Low-pressure measurement using an ultrasonic sensor

被引：1

作者：

Ishikawa, T ^{[1
]}

机构：

[1] Niihama Natl Coll Technol, Niihama, Ehime 7928580, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 4A期

关键词：

ultrasonic sensor; low-pressure measurement; air; room temperature;

D O I：

10.1143/JJAP.38.2173

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ultrasonic waves are applied for low-pressure measurement for the first time. The pressure dependence of ultrasonic signals over the range from 13 to 10(5) Pa shows a linear relation in a log-log plot. The linear relation, however, has a bend around 10(3) Pa which is dependent on the distance between the speaker and receiver sensors. Ultrasonic signals in the pressure region higher than 10(3) Pa are proportional to the pressure p, whereas signals lower than 10(3) Pa are fitted by a power function of p(1.5).

引用

页码：2173 / 2174

页数：2

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