Low-pressure measurement using an ultrasonic sensor

被引：1
|
作者：
Ishikawa, T [1 ]
机构：
[1] Niihama Natl Coll Technol, Niihama, Ehime 7928580, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1999年 / 38卷 / 4A期
关键词：
ultrasonic sensor; low-pressure measurement; air; room temperature;
D O I：
10.1143/JJAP.38.2173
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Ultrasonic waves are applied for low-pressure measurement for the first time. The pressure dependence of ultrasonic signals over the range from 13 to 10(5) Pa shows a linear relation in a log-log plot. The linear relation, however, has a bend around 10(3) Pa which is dependent on the distance between the speaker and receiver sensors. Ultrasonic signals in the pressure region higher than 10(3) Pa are proportional to the pressure p, whereas signals lower than 10(3) Pa are fitted by a power function of p(1.5).
引用
收藏
页码：2173 / 2174
页数：2
相关论文
共 50 条
  • [1] Low-pressure measurement using an ultrasonic sensor II
    Ishikawa, Toshiaki
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1999, 38 (9 A): : 5301 - 5302
  • [2] Low-pressure measurement using an ultrasonic sensor II
    Ishikawa, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (9A): : 5301 - 5302
  • [3] Low-pressure measurement
    Clayton, R
    MEASUREMENTS & CONTROL, 1997, (182): : 106 - 112
  • [4] Mechanical Structural Design of a Piezoresistive Pressure Sensor for Low-Pressure Measurement: A Computational Analysis by Increases in the Sensor Sensitivity
    Anh Vang Tran
    Zhang, Xianmin
    Zhu, Benliang
    SENSORS, 2018, 18 (07)
  • [5] A Wireless and Passive Low-Pressure Sensor
    Nicolay, Pascal
    Lenzhofer, Martin
    SENSORS, 2014, 14 (02) : 3065 - 3076
  • [6] Sensor tracks low-pressure carburizing
    Jacquet, P
    Bernard, G
    Lambertin, M
    ADVANCED MATERIALS & PROCESSES, 2000, : H19 - H21
  • [7] ION GAUGES FOR LOW-PRESSURE MEASUREMENT
    HELMER, JC
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1967, 4 (05): : 329 - &
  • [8] DIGITAL COMPENSATED CAPACITIVE PRESSURE SENSOR USING CMOS TECHNOLOGY FOR LOW-PRESSURE MEASUREMENTS
    NAGATA, T
    TERABE, H
    KUWAHARA, S
    SAKURAI, S
    TABATA, O
    SUGIYAMA, S
    ESASHI, M
    SENSORS AND ACTUATORS A-PHYSICAL, 1992, 34 (02) : 173 - 177
  • [9] A Completely Wireless and Passive Low-Pressure Sensor
    Krall, Christoph
    Nicolay, Pascal
    2015 IEEE TENTH INTERNATIONAL CONFERENCE ON INTELLIGENT SENSORS, SENSOR NETWORKS AND INFORMATION PROCESSING (ISSNIP), 2015,
  • [10] MEASUREMENT OF LOW-PRESSURE SPRINKLER EVAPORATION LOSS
    KOHL, KD
    KOHL, RA
    DEBOER, DW
    TRANSACTIONS OF THE ASAE, 1987, 30 (04): : 1071 - 1074
12345