High-Q photonic crystal microcavities fabricated in a thin GaAs membrane

被引:32
作者
Reese, C [1 ]
Gayral, B
Gerardot, BD
Imamoglu, A
Petroff, PM
Hu, E
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
[2] Univ Calif Santa Barbara, Dept Mat Sci, Santa Barbara, CA 93106 USA
[3] Univ Calif Santa Barbara, Dept Phys, Santa Barbara, CA 93106 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2001年 / 19卷 / 06期
关键词
D O I
10.1116/1.1412893
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We report on the fabrication of photonic crystal microcavities in GaAs having H I and H2 defects for lattice constants as small as 255 nm. In H2 microcavities, we observed resonances with Q factors as high as 4000. The degeneracy of these high-Q modes is lifted by the imperfect nature of the fabrication process. (C) 2001 American Vacuum Society.
引用
收藏
页码:2749 / 2752
页数:4
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