Valence and Conduction Band Offsets for InN and III-Nitride Ternary Alloys on (-201) Bulk β-Ga2O3

被引:19
|
作者
Fares, Chaker [1 ]
Tadjer, Marko J. [2 ]
Woodward, Jeffrey [3 ]
Nepal, Neeraj [2 ]
Mastro, Michael A. [2 ]
Eddy, Charles R., Jr. [2 ]
Ren, Fan [1 ]
Pearton, Stephen J. [1 ]
机构
[1] Univ Florida, Gainesville, FL 32611 USA
[2] Naval Res Lab, Washington, DC 20375 USA
[3] NRL, Washington, DC USA
关键词
EPITAXIAL-GROWTH; THIN-FILMS; LAYER; EDGE; GAP;
D O I
10.1149/2.0281907jss
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Valence and conduction band offsets of the InN/beta-Ga2O3 type-I heterojunction have been determined to be -0.55 +/- 0.11 eV and -3.35 +/- 0.11 eV, respectively, using X-ray photoelectron spectroscopy. The InN layers were grown using atomic layer epitaxy on (-201) oriented commercial beta-Ga2O3 substrates. Combining this data with published band offsets for the GaN and AlN heterojunctions to beta-Ga2O3 has allowed us to predict the band offsets for the AlGaN, AlInN, and InGaN ternary alloys to beta-Ga2O3. The conduction band offsets for InGaN and AlInN to beta-Ga2O3 increased for high In concentration and, similarly, the valence band offsets for AlGaN and AlInN to beta-Ga2O3 decreased at high Al concentration. (C) The Author(s) 2019. Published by ECS.
引用
收藏
页码:Q3154 / Q3158
页数:5
相关论文
共 50 条
  • [1] Conduction and valence band offsets of LaAl2O3 with (-201) β-Ga2O3
    Carey, Patrick H.
    Ren, Fan
    Hays, David C.
    Gila, Brent P.
    Pearton, Stephen J.
    Jang, Soohwan
    Kuramata, Akito
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2017, 35 (04):
  • [2] Valence and conduction band offsets of β-Ga2O3/AlN heterojunction
    Sun, Haiding
    Castanedo, C. G. Torres
    Liu, Kaikai
    Li, Kuang-Hui
    Guo, Wenzhe
    Lin, Ronghui
    Liu, Xinwei
    Li, Jingtao
    Li, Xiaohang
    APPLIED PHYSICS LETTERS, 2017, 111 (16)
  • [3] Valence and conduction band offsets in AZO/Ga2O3 heterostructures
    Carey, Patrick H.
    Ren, F.
    Hays, David C.
    Gila, B. P.
    Pearton, S. J.
    Jang, Soohwan
    Kuramata, Akito
    VACUUM, 2017, 141 : 103 - 108
  • [4] Valence band offsets for CuI on (-201) bulk Ga2O3 and epitaxial (010) (Al0.14Ga0.86)2O3
    Fares, Chaker
    Ren, F.
    Hays, David C.
    Gila, B. P.
    Tadjer, Marko
    Hobart, Karl D.
    Pearton, S. J.
    APPLIED PHYSICS LETTERS, 2018, 113 (18)
  • [5] Band offsets in ITO/Ga2O3 heterostructures
    Carey, Patrick H.
    Ren, F.
    Hays, David C.
    Gila, B. P.
    Pearton, S. J.
    Jang, Soohwan
    Kuramata, Akito
    APPLIED SURFACE SCIENCE, 2017, 422 : 179 - 183
  • [6] Band alignment of Al2O3 with (-201) β-Ga2O3
    Carey, Patrick H.
    Ren, F.
    Hays, David C.
    Gila, B. P.
    Pearton, S. J.
    Jang, Soohwan
    Kuramata, Akito
    VACUUM, 2017, 142 : 52 - 57
  • [7] Investigation of band gaps and bowing parameters for zincblende III-nitride ternary alloys
    Liou, Bo-Ting
    Yen, Sheng-Horng
    Kuo, Yen-Kuang
    GALLIUM NITRIDE MATERIALS AND DEVICES, 2006, 6121
  • [8] Band offsets at the interfaces between β-Ga2O3 and Al2O3
    Lyu, Sai
    PHYSICAL REVIEW MATERIALS, 2023, 7 (01)
  • [9] Characteristics study of heterojunction III-nitride/β-Ga2O3 nano-HEMT for THz applications
    Rao, G. Purnachandra
    Lenka, Trupti Ranjan
    Vadala, Valeria
    Nguyen, Hieu Pham Trung
    ENGINEERING RESEARCH EXPRESS, 2024, 6 (02):
  • [10] Energy band offsets at a Ga2O3(Gd2O3)-GaAs interface
    Lay, TS
    Hong, M
    Kwo, J
    Mannaerts, JP
    Hung, WH
    Huang, DJ
    COMPOUND SEMICONDUCTOR SURFACE PASSIVATION AND NOVEL DEVICE PROCESSING, 1999, 573 : 131 - 135