Direct deposition of semitransparent conducting pyrolytic carbon films

被引：40

作者：

Kaplas, Tommi ^{[1
]}

Svirko, Yuri ^{[1
]}

机构：

[1] Univ Eastern Finland, Dept Math & Phys, FI-80101 Joensuu, Finland

来源：

JOURNAL OF NANOPHOTONICS | 2012年 / 6卷

基金：

芬兰科学院;

关键词：

pyrolytic carbon; transparent electrodes; chemical vapor deposition; CHEMICAL-VAPOR-DEPOSITION; LOW-TEMPERATURE REGIME; REDUCED GRAPHENE OXIDE; RAMAN-SPECTROSCOPY; PYROCARBON DEPOSITION; LARGE-AREA; ULTRATHIN FILMS; TRANSPARENT; NANOTUBES; CHEMISTRY;

D O I：

10.1117/1.JNP.6.061703

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Ultrathin pyrolytic carbon films were synthesized in a single step on dielectric substrates, using a methane-based chemical vapor deposition technique. The developed technique enables the production of wafer scale transparent conductive films suitable for applications in optics and optoelectronics. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.JNP.6.061703]

引用

页数：7

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