Fabrication of Transistors on Flexible Substrates: from Mass-Printing to High-Resolution Alternative Lithography Strategies

被引:252
作者
Moonen, Pieter F. [1 ]
Yakimets, Iryna [2 ]
Huskens, Jurriaan [1 ]
机构
[1] Univ Twente, Mol Nanofabricat Grp, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands
[2] TNO, Holst Ctr, NL-5656 AE Eindhoven, Netherlands
关键词
flexible electronics; soft lithography; nanoimprint lithography; mass printing; high-resolution printing; THIN-FILM TRANSISTORS; ROLL-TO-ROLL; FLASH IMPRINT LITHOGRAPHY; FIELD-EFFECT TRANSISTORS; LIGHT-EMITTING DEVICES; POLYMER SOLAR-CELLS; NANOIMPRINT LITHOGRAPHY; ORGANIC TRANSISTORS; STRETCHABLE ELECTRONICS; PROJECTION LITHOGRAPHY;
D O I
10.1002/adma.201202949
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this report, the development of conventional, mass-printing strategies into high-resolution, alternative patterning techniques is reviewed with the focus on large-area patterning of flexible thin-film transistors (TFTs) for display applications. In the first part, conventional and digital printing techniques are introduced and categorized as far as their development is relevant for this application area. The limitations of conventional printing guides the reader to the second part of the progress report: alternative-lithographic patterning on low-cost flexible foils for the fabrication of flexible TFTs. Soft and nanoimprint lithography-based patterning techniques and their limitations are surveyed with respect to patterning on low-cost flexible foils. These show a shift from fabricating simple microlense structures to more complicated, high-resolution electronic devices. The development of alternative, low-temperature processable materials and the introduction of high-resolution patterning strategies will lead to the low-cost, self-aligned fabrication of flexible displays and solar cells from cheaper but better performing organic materials.
引用
收藏
页码:5526 / 5541
页数:16
相关论文
共 176 条
[61]   Nanotransfer printing of organic and carbon nanotube thin-film transistors on plastic substrates [J].
Hines, DR ;
Mezhenny, S ;
Breban, M ;
Williams, ED ;
Ballarotto, VW ;
Esen, G ;
Southard, A ;
Fuhrer, MS .
APPLIED PHYSICS LETTERS, 2005, 86 (16) :1-3
[62]  
Hornung M., 2010, IEEE NANO 2010 KOR, P339
[63]   Selective Electroless Copper Plating on Poly(ethylene terephthalate) Surfaces by Microcontact Printing [J].
Huang, Shih-Chun ;
Tsao, Ting-Chieh ;
Chen, Li-Jen .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2010, 157 (04) :D222-D227
[64]   Reversal imprinting by transferring polymer from mold to substrate [J].
Huang, XD ;
Bao, LR ;
Cheng, X ;
Guo, LJ ;
Pang, SW ;
Yee, AF .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06) :2872-2876
[65]   Ring oscillator fabricated completely by means of mass-printing technologies [J].
Huebler, A. C. ;
Doetz, F. ;
Kempa, H. ;
Katz, H. E. ;
Bartzsch, M. ;
Brandt, N. ;
Hennig, I. ;
Fuegmann, U. ;
Vaidyanathan, S. ;
Granstrom, J. ;
Liu, S. ;
Sydorenko, A. ;
Zillger, T. ;
Schmidt, G. ;
Preissler, K. ;
Reichmanis, E. ;
Eckerle, P. ;
Richter, F. ;
Fischer, T. ;
Hahn, U. .
ORGANIC ELECTRONICS, 2007, 8 (05) :480-486
[66]   Three-dimensional integrated circuit using printed electronics [J].
Huebler, A. C. ;
Schmidt, G. C. ;
Kempa, H. ;
Reuter, K. ;
Hambsch, M. ;
Bellmann, M. .
ORGANIC ELECTRONICS, 2011, 12 (03) :419-423
[67]   Roll-to-Roll Fabrication and Metastability in Metal Oxide Transistors [J].
Jackson, Warren B. ;
Kim, Han-Jun ;
Kwon, Ohseung ;
Yeh, Bao ;
Hoffman, Randy ;
Mourey, Devin ;
Koch, Tim ;
Taussig, Carl ;
Elder, Rich ;
Jeans, Albert .
ADVANCES IN DISPLAY TECHNOLOGIES AND E-PAPERS AND FLEXIBLE DISPLAYS, 2011, 7956
[68]  
Jackson WB, 2007, ECS Trans, V8, P199, DOI [10.1149/1.2767308, DOI 10.1149/1.2767308]
[69]   Flexible electronics and displays: High-resolution, roll-to-roll, projection lithography and photoablation processing technologies for high-throughput production [J].
Jain, K ;
Klosner, M ;
Zemel, M ;
Raghunandan, S .
PROCEEDINGS OF THE IEEE, 2005, 93 (08) :1500-1510
[70]   ULTRAFAST DEEP UV LITHOGRAPHY WITH EXCIMER LASERS [J].
JAIN, K ;
WILLSON, CG ;
LIN, BJ .
ELECTRON DEVICE LETTERS, 1982, 3 (03) :53-55