Fabrication of Transistors on Flexible Substrates: from Mass-Printing to High-Resolution Alternative Lithography Strategies

被引:249
|
作者
Moonen, Pieter F. [1 ]
Yakimets, Iryna [2 ]
Huskens, Jurriaan [1 ]
机构
[1] Univ Twente, Mol Nanofabricat Grp, MESA Inst Nanotechnol, NL-7500 AE Enschede, Netherlands
[2] TNO, Holst Ctr, NL-5656 AE Eindhoven, Netherlands
关键词
flexible electronics; soft lithography; nanoimprint lithography; mass printing; high-resolution printing; THIN-FILM TRANSISTORS; ROLL-TO-ROLL; FLASH IMPRINT LITHOGRAPHY; FIELD-EFFECT TRANSISTORS; LIGHT-EMITTING DEVICES; POLYMER SOLAR-CELLS; NANOIMPRINT LITHOGRAPHY; ORGANIC TRANSISTORS; STRETCHABLE ELECTRONICS; PROJECTION LITHOGRAPHY;
D O I
10.1002/adma.201202949
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In this report, the development of conventional, mass-printing strategies into high-resolution, alternative patterning techniques is reviewed with the focus on large-area patterning of flexible thin-film transistors (TFTs) for display applications. In the first part, conventional and digital printing techniques are introduced and categorized as far as their development is relevant for this application area. The limitations of conventional printing guides the reader to the second part of the progress report: alternative-lithographic patterning on low-cost flexible foils for the fabrication of flexible TFTs. Soft and nanoimprint lithography-based patterning techniques and their limitations are surveyed with respect to patterning on low-cost flexible foils. These show a shift from fabricating simple microlense structures to more complicated, high-resolution electronic devices. The development of alternative, low-temperature processable materials and the introduction of high-resolution patterning strategies will lead to the low-cost, self-aligned fabrication of flexible displays and solar cells from cheaper but better performing organic materials.
引用
收藏
页码:5526 / 5541
页数:16
相关论文
共 26 条
  • [1] Fabrication of high-resolution conductive lines by combining inkjet printing with soft lithography
    Sung, Jisu
    Kang, Byung Ju
    Oh, Je Hoon
    MICROELECTRONIC ENGINEERING, 2013, 110 : 219 - 223
  • [2] High-Resolution Transfer Printing of Graphene Lines for Fully Printed, Flexible Electronics
    Song, Donghoon
    Mahajan, Ankit
    Secor, Ethan B.
    Hersam, Mark C.
    Francis, Lorraine F.
    Frisbie, C. Daniel
    ACS NANO, 2017, 11 (07) : 7431 - 7439
  • [3] High-Resolution Lithography for High-Frequency Organic Thin-Film Transistors
    Zschieschang, Ute
    Klauk, Hagen
    Borchert, James W. W.
    ADVANCED MATERIALS TECHNOLOGIES, 2023, 8 (11)
  • [4] Printing meets lithography: Soft approaches to high-resolution patterning
    Michel, B
    Bernard, A
    Bietsch, A
    Delamarche, E
    Geissler, M
    Juncker, D
    Kind, H
    Renault, JP
    Rothuizen, H
    Schmid, H
    Schmidt-Winkel, P
    Stutz, R
    Wolf, H
    CHIMIA, 2002, 56 (10) : 527 - 542
  • [5] Fabrication of a high-resolution roll for gravure printing of 2μm features
    Grau, Gerd
    Kitsomboonloha, Rungrot
    Subramanian, Vivek
    ORGANIC FIELD-EFFECT TRANSISTORS XIV; AND ORGANIC SENSORS AND BIOELECTRONICS VIII, 2015, 9568
  • [6] Development of materials and printing methods for fabrication of thin-film transistors on flexible substrates
    Zhao, Jianwen
    Gao, Yulong
    Gu, Weibin
    Wang, Chao
    Lin, Jian
    Chen, Zheng
    Cui, Zheng
    NANOTECHNOLOGY 2012, VOL 1: ADVANCED MATERIALS, CNTS, PARTICLES, FILMS AND COMPOSITES, 2012, : 248 - 251
  • [7] Fabrication of high-resolution nanopattern by using nanocontact printing with flexible h-PDMS stamp
    Jo, Jeongdai
    Lee, Taik-Min
    Kim, Kwang-Young
    Lee, Eung-Sug
    Esashi, Masayoshi
    MECHANICAL BEHAVIOR OF MATERIALS X, PTS 1AND 2, 2007, 345-346 : 1257 - +
  • [8] High-resolution flexible electronic devices by electrohydrodynamic jet printing: From materials toward applications
    Zheng, Xinran
    Hu, Mingshuang
    Liu, Yixuan
    Zhang, Jun
    Li, Xiangxiang
    Li, Ximing
    Yang, Hui
    SCIENCE CHINA-MATERIALS, 2022, 65 (08) : 2089 - 2109
  • [9] High-resolution continuous microcontact printing on various substrates for organic and oxide electronics
    Yu, Kyeong Min
    Lee, So-Hyun
    Non, En-Kyung
    Kim, Ju-Ryong
    Lee, Bo Mi
    Kim, Dong-Soo
    Kim, Min-Hoi
    FLEXIBLE AND PRINTED ELECTRONICS, 2021, 6 (02):
  • [10] High-resolution direct-writing of metallic electrodes on flexible substrates for high performance organic field effect transistors
    Bucella, Sadir G.
    Nava, Giorgio
    Vishunubhatla, Krishna Chaitanya
    Caironi, Mario
    ORGANIC ELECTRONICS, 2013, 14 (09) : 2249 - 2256