A next queue algorithm in real time dispatching system of semiconductor manufacturing

被引：1

作者：

Chen, YJ ^{[1
]}

Yu, G ^{[1
]}

Huang, KS ^{[1
]}

Wang, I ^{[1
]}

机构：

[1] Macronix Int Co Ltd, Hsinchu, Taiwan

来源：

ISSM 2000: NINTH INTERNATIONAL SYMPOSIUM ON SEMICONDUCTOR MANUFACTURING, PROCEEDINGS | 2000年

关键词：

dispatching rules; production scheduling; semiconductor manufacturing;

D O I：

10.1109/ISSM.2000.993618

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper demonstrates a next-queue rule in the real time dispatcher developed in MXIC FAB I The outline of this system is first presented. Then, the dispatching rule design logic is described. The real time dispatching system makes lot-dispatching work easy for operators. And a next queue algorithm was developed in the implementation of the real time dispatcher Finally, it has been proved that the dispatching algorithm not only improves FAB utilization but also reduces cycle time. Implementation of the real time dispatching system keeps reducing of cycle time and improves tool utilization by 7% from Q2 1999 to now.

引用

页码：67 / 70

页数：4

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