The design and simulation of a novel out-of-plane micro electrostatic actuator

This paper presents a mechanism of developing a novel out-of-plane micro electrostatic actuator capable of causing large out-of-plane deflection. The performance of the actuator is evaluated and simulated by MEMCAD software. Initial analysis results indicated that the usage of both the novel U-shape suspension beam and the electrostatic actuation mechanism permit large rotations motion with respect to the increment of the numbers of electrodes. Moreover, stable rotational motion can be achieved by varying the dimensions of electrode and gap spacing. This design advantage brings the possibility of developing other three-dimensional (3D) structures for on and/or out-of-wafer applications such as optical switch or display.