Enhancement of the reflectivity of multilayer X-ray mirrors by ultrathin carbon film deposition

被引：6
作者：
Baranov, AM [1 ]
机构：
[1] Res Inst Vacuum Tech, Moscow 113105, Russia
来源：
OPTICS COMMUNICATIONS | 1999年 / 167卷 / 1-6期
关键词：
X-ray mirror; carbon film; reflectivity; roughness; planarization;
D O I：
10.1016/S0030-4018(99)00307-7
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The problems related to the enhancement of the reflectivity of multilayer carbon X-ray mirrors are considered. It is shown that the main contribution to the decrease in reflectivity comes from the roughness of the top layer of the multilayer structure. A method of planarization of X-ray mirror surface that results in a reflectivity increase is suggested. (C) 1999 Published by Elsevier Science B.V. All rights reserved.
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页码：23 / 26
页数：4
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