A novel fabrication method of fiber-tip Fabry-Perot interferometer for high-sensitivity gas-pressure measurements

被引：0

作者：

Zhang, Zhe ^{[1
]}

He, Jun ^{[1
]}

Liao, Changrui ^{[1
]}

Tang, Jian ^{[1
]}

Wang, Ying ^{[1
]}

Zhang, Feng ^{[1
]}

Wang, Yiping ^{[1
]}

机构：

[1] Minist Educ & Guangdong Prov, Key Lab Optoelect Devices & Syst, Shenzhen 518060, Peoples R China

来源：

2017 16TH INTERNATIONAL CONFERENCE ON OPTICAL COMMUNICATIONS & NETWORKS (ICOCN 2017) | 2017年

基金：

中国国家自然科学基金;

关键词：

Optical fiber measurements; Optical fiber devices; Thin film devices; SENSOR; DIAPHRAGM; TEMPERATURE; CAVITY;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a novel polyvinyl chloride (PVC) diaphragm-based fiber-tip Fabry-Perot interferometer for gas pressure measurements with ultra-high sensitivity. The PVC diaphragm has been coated to the end facet of a well-cut standard single-mode fiber by use of a plastic welder. Ultrahigh pressure sensitivity of similar to 66.07 nm/MPa at 1565 nm and a low temperature cross-sensitivity of similar to-5.5 KPa/degrees C have been experimentally demonstrated. The proposed sensor has advantages of high pressure sensitivity, miniature size low cost and easy fabrication.

引用

页数：3

共 22 条

[1] Miniature Fabry-Perot pressure sensor created by using UV-molding process with an optical fiber based mold [J].

Bae, H. ;

Yu, M. .

OPTICS EXPRESS, 2012, 20 (13) :14573-14583

[2] High performance chitosan diaphragm-based fiber-optic acoustic sensor [J].

Chen, L. H. ;

Chan, C. C. ;

Yuan, W. ;

Goh, S. K. ;

Sun, J. .

SENSORS AND ACTUATORS A-PHYSICAL, 2010, 163 (01) :42-47

[3] Miniature fiber-optic pressure sensor with a polymer diaphragm [J].

Cibula, E ;

Donlagic, D .

APPLIED OPTICS, 2005, 44 (14) :2736-2744

[4] SU-8 MEMS Fabry-Perot pressure sensor [J].

Hill, G. C. ;

Melamud, R. ;

Declercq, F. E. ;

Davenport, A. A. ;

Chan, I. H. ;

Hartwell, P. G. ;

Pruitt, B. L. .

SENSORS AND ACTUATORS A-PHYSICAL, 2007, 138 (01) :52-62

[5] Sub-micron silica diaphragm-based fiber-tip Fabry-Perot interferometer for pressure measurement [J].

Liao, Changrui ;

Liu, Shen ;

Xu, Lei ;

Wang, Chao ;

Wang, Yiping ;

Li, Zhengyong ;

Wang, Qiao ;

Wang, D. N. .

OPTICS LETTERS, 2014, 39 (10) :2827-2830

[6] Optics Temperature-Dependent Nonuniformity Correction Via l0-Regularized Prior for Airborne Infrared Imaging Systems [J].

Liu, Li ;

Zhang, Tianxu .

IEEE PHOTONICS JOURNAL, 2016, 8 (05)

[7] Fiber-optic ferrule-top nanomechanical resonator with multilayer graphene film [J].

Ma, Jun ;

Jin, Wei ;

Xuan, Haifeng ;

Wang, Chao ;

Ho, Hoi Lut .

OPTICS LETTERS, 2014, 39 (16) :4769-4772

[8] High-sensitivity fiber-tip pressure sensor with graphene diaphragm [J].

Ma, Jun ;

Jin, Wei ;

Ho, Hoi Lut ;

Dai, Ji Yan .

OPTICS LETTERS, 2012, 37 (13) :2493-2495

[9] A Compact Fiber-Tip Micro-Cavity Sensor for High-Pressure Measurement [J].

Ma, Jun ;

Ju, Jian ;

Jin, Long ;

Jin, Wei .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2011, 23 (21) :1561-1563

[10] Environmentally stable Fabry-Perot-type strain sensor based on hollow-core photonic bandgap fiber [J].

Shi, Qing ;

Lv, Fuyun ;

Wang, Zhi ;

Jin, Long ;

Hu, Juan Juan ;

Liu, Zhanyuan ;

Kai, Guiyun ;

Dong, Xiaoyi .

IEEE PHOTONICS TECHNOLOGY LETTERS, 2008, 20 (1-4) :237-239

← 1 2 3 →