3-Dimensional Beam Scanner for a Handheld Confocal Dermoscope

被引：0
|
作者：
Liu, Tianbo [1 ]
Dickensheets, David L. [1 ]
机构：
[1] Montana State Univ, Bozeman, MT 59717 USA
来源：
2016 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS (OMN) | 2016年
关键词：
MEMS scanning; focus control; TSV; SU-8; XeF2;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A MEMS active optical element delivers dual axis pointing and scanning with dynamic focus control for a handheld in vivo confocal microscope. This paper describes the design, processing steps and preliminary fabrication results of the new device.
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页数：2
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