Dielectric Properties of Bismuth Layer-Structured Oxide Thin Films with Preferential Crystal Orientation at High-Temperature

被引:0
作者
Mizutani, Yuki [1 ]
Kimura, Junichi [2 ]
Takuwa, Itaru [2 ]
Yamada, Tomoaki [2 ]
Funakubo, Hiroshi [2 ]
Uchida, Hiroshi [1 ]
机构
[1] Sophia Univ, Dept Mat & Life Sci, Chiyoda Ku, Tokyo 1028554, Japan
[2] Tokyo Inst Technol, Dept Innovat & Engn, Yokohama, Kanagawa 2268503, Japan
来源
ELECTROCERAMICS IN JAPAN XIV | 2011年 / 485卷
关键词
Thin film; CaBi4Ti4O15; SrBi4Ti4O15; Chemical solution deposition; Crystal orientation; Temperature coefficient of capacitance; FERROELECTRIC PROPERTIES; SINGLE-CRYSTALS; DEPENDENCE;
D O I
10.4028/www.scientific.net/KEM.485.191
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Thin films of MBi4Ti4O15 (M = Ca and Sr) with preferential crystal orientation were fabricated using underneath perovskite layers on various substrates. One-axis BLSD films on (100)LaNiO3/(111)Pt/Ti/(100)Si and epitaxial BLSD films on (100)SrRuO3//(100)SrTiO3 were fabricated by chemical solution deposition (CSD). Dielectric constants of the CaBi4Ti4O15 and SrBi4Ti4O15 films on (100)LaNiO3/(111)Pt/Ti/(100)Si were approximately 250, while those on (100)SrRuO3//(100)SrTiO3 were 220, respectively. The temperature coefficients of capacitance (TCCs) of these films were below 10% in atmospheric temperature range between R.T. and 300 degrees C, which is significantly smaller than those of conventional (Ba,Sr)TiO3-based capacitors.
引用
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页码:191 / +
页数:2
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