Highly Asymmetric Lamellar Nanopatterns via Block Copolymer Blends Capable of Hydrogen Bonding

被引:67
作者
Han, Sung Hyun [2 ]
Pryamitsyn, Victor [1 ]
Bae, Dusik [2 ]
Kwak, Jongheon [2 ]
Ganesan, Venkat [1 ]
Kim, Jin Kon [2 ]
机构
[1] Univ Texas Austin, Dept Chem Engn, Austin, TX 78712 USA
[2] Pohang Univ Sci & Technol, Natl Creat Res Ctr Block Copolymer Self Assembly, Dept Chem Engn, Kyungbuk 790784, South Korea
基金
美国国家科学基金会; 新加坡国家研究基金会;
关键词
tunable nanoscopic line patterns; block copolymer lithography; highly asymmetric lamellar microdomains; blend of block copolymers; hydrogen bonding; DEVICE-ORIENTED STRUCTURES; DIBLOCK COPOLYMERS; BINARY BLENDS; THIN-FILMS; LITHOGRAPHY; NANOSTRUCTURE; FABRICATION; PATTERNS; ARRAYS; MORPHOLOGY;
D O I
10.1021/nn3025089
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Highly asymmetric lamellar microdomains, such as those required for many lithographic line patterns, cannot be straightforwardly achieved by conventional block copolymer self-assembly. We present a conceptually new and versatile approach to produce highly asymmetric lamellar morphologies by the use of binary blends of block copolymers whose components are capable of hydrogen bonding. We first demonstrate our strategy in bulk systems and complement the experimental results observed by transmission electron microscopy and small-angle X-ray scattering with theoretical calculations based on strong stretching theory to suggest the generality of the strategy. To illustrate the impact on potential lithographic applications, we demonstrate that our strategy can be transferred to thin film morphologies. For this purpose, we used solvent vapor annealing to prepare thin films with vertically oriented asymmetric lamellar patterns that preserve the bulk morphological characteristics. Due to the highly asymmetric lamellar microdomains, the line width is reduced to sub-10 nm scale, while its periodicity is precisely tuned.
引用
收藏
页码:7966 / 7972
页数:7
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