Highly asymmetric lamellar microdomains, such as those required for many lithographic line patterns, cannot be straightforwardly achieved by conventional block copolymer self-assembly. We present a conceptually new and versatile approach to produce highly asymmetric lamellar morphologies by the use of binary blends of block copolymers whose components are capable of hydrogen bonding. We first demonstrate our strategy in bulk systems and complement the experimental results observed by transmission electron microscopy and small-angle X-ray scattering with theoretical calculations based on strong stretching theory to suggest the generality of the strategy. To illustrate the impact on potential lithographic applications, we demonstrate that our strategy can be transferred to thin film morphologies. For this purpose, we used solvent vapor annealing to prepare thin films with vertically oriented asymmetric lamellar patterns that preserve the bulk morphological characteristics. Due to the highly asymmetric lamellar microdomains, the line width is reduced to sub-10 nm scale, while its periodicity is precisely tuned.
机构:Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Asari, T
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Arai, S
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机构:Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Arai, S
;
Takano, A
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机构:Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Takano, A
;
Matsushita, Y
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Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
机构:
Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Asari, T
;
Matsuo, S
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Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Matsuo, S
;
Takano, A
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Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Takano, A
;
Matsushita, Y
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Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
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Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Cornell Univ, Dept Chem & Biol Chem, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Bosworth, Joan K.
;
Black, Charles T.
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Brookhaven Natl Lab, Ctr Funct Nanomat, Upton, NY 11973 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Black, Charles T.
;
Obert, Christopher K.
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Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
机构:Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Asari, T
;
Arai, S
论文数: 0引用数: 0
h-index: 0
机构:Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Arai, S
;
Takano, A
论文数: 0引用数: 0
h-index: 0
机构:Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Takano, A
;
Matsushita, Y
论文数: 0引用数: 0
h-index: 0
机构:
Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
机构:
Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Asari, T
;
Matsuo, S
论文数: 0引用数: 0
h-index: 0
机构:
Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Matsuo, S
;
Takano, A
论文数: 0引用数: 0
h-index: 0
机构:
Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
Takano, A
;
Matsushita, Y
论文数: 0引用数: 0
h-index: 0
机构:
Nagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, JapanNagoya Univ, Grad Sch Engn, Dept Appl Chem, Chikusa Ku, Nagoya, Aichi 4648603, Japan
机构:
Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Cornell Univ, Dept Chem & Biol Chem, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Bosworth, Joan K.
;
Black, Charles T.
论文数: 0引用数: 0
h-index: 0
机构:
Brookhaven Natl Lab, Ctr Funct Nanomat, Upton, NY 11973 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA
Black, Charles T.
;
Obert, Christopher K.
论文数: 0引用数: 0
h-index: 0
机构:
Cornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USACornell Univ, Dept Mat Sci & Engn, Ithaca, NY 14853 USA