High Surface Capacity Li-ion All Solid State 3D Microbattery Based On Anatase TiO2Deposited By ALD On Silicon Microstructures

被引：1

作者：

Eustache, E. ^{[1
,2
,3
,4
]}

Tilmant, P. ^{[1
]}

Morgenroth, L. ^{[1
]}

Roussel, P. ^{[5
]}

Rolland, N. ^{[1
,2
,4
]}

Brousse, T. ^{[3
,4
]}

Lethien, C. ^{[1
,2
,4
]}

机构：

[1] Univ Lille 1, IEMN, CNRS, UMR 8520, F-59655 Villeneuve Dascq, France

[2] Univ Lille 1, IRCICA, CNRS, USR 3380, F-59655 Villeneuve Dascq, France

[3] Univ Nantes, IMN JR, CNRS, UMR 6502, Nantes, France

[4] CNRS, RS2E FR 3459, F-75700 Paris, France

[5] Univ Lille 1, UCCS, CNRS, UMR 8181, F-59655 Villeneuve Dascq, France

来源：

ATOMIC LAYER DEPOSITION APPLICATIONS 9 | 2013年 / 58卷 / 10期

关键词：

3-DIMENSIONAL MICROBATTERY; FABRICATION; ARCHITECTURES; ELECTRODES; MEMS;

D O I：

10.1149/05810.0119ecst

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

The proposed study deals with the design, the fabrication and the characterization of 3D silicon microstructures decorated with step conformal and pin hole free anatase TiO2 negative electrode deposited by atomic layer deposition. A high aspect ratio and dense array of 3D silicon micropillars or microtubes are fabricated on silicon wafer. The obtained surface capacity of the TiO2 layer (150nm) deposited on 3D microtubes (area enlargement factor = 25) reaches 0.15 mAh/cm(2) at C/4. The reported 3D topologies enhance the capacity of standard TiO2 2D thin film electrode.

引用

页码：119 / 129

页数：11

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