Nitrogen adsorption phases on the 4H-SiC(0001) Si-face

被引:6
作者
Ashman, Christopher R. [1 ]
Pennington, Gary [2 ]
机构
[1] High Performance Technol Inc, Reston, VA 20190 USA
[2] USA, Res Lab, Adelphi, MD 20783 USA
关键词
Density functional calculations; Chemisorption; Growth; Interface states; Surface structure; SiC; Nitrogen;
D O I
10.1016/j.susc.2008.10.013
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Using the density functional theory this paper identifies two phases of nitrogen which form on the 4H-SiC(0001) Si-face. At 1/3 ML, N-adatoms occupy the sites between three surface silicon atoms bonding to each of the three available half-filled silicon dangling bonds. This passivates the surface dangling bonds and removes states from the upper half of the band gap. Above this coverage nitrogen atoms pair on the surface to form dimers with a corresponding. change in the chemical potential. The nitrogen dimers reintroduce states into the SiC band gap. Between 1/3 ML and 1 ML coverage, the nitrogen redistributes in patches corresponding to regions of 1/3 ML coverage and 1 ML coverage. At 1 ML the nitrogen dimers populate all the silicon dangling bonds, thus forming a new surface phase. Above 1 ML a third bonding configuration appears in which the nitrogen dimers are only a singly bonded to the surface. This configuration saturates at 2 ML. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:3617 / 3622
页数:6
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