Tribological properties of R-C thin films deposited by magnetron-sputter-ion plating method

被引：33
作者：
Knotek, O
Lugscheider, E
Siry, CW
机构：
[1] RWTH Aachen University of Technology, Materials Science Institute, 52056 Aachen
来源：
SURFACE & COATINGS TECHNOLOGY | 1997年 / 91卷 / 03期
关键词：
tribological properties; B-C thin films; magnetron-sputter-ion plating;
D O I：
10.1016/S0257-8972(96)03105-2
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The material system of boron-carbon (B-C) offers a high variety of properties. Following to an overview on possible material properties the potential of the deposited films by magnetron-sputter-ion plating-PVD is outlined. The influence of target operation condition is reported. Thin films are deposited on several metal substrates. Material properties of the films are described. A tribological evaluation is carried out by several tests like modified pin-on-disk test and taber test to outline wear protection effects on tribosystems with metal counter part.
引用
收藏
页码：167 / 173
页数：7
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