Band Alignment and Interface Recombination in NiO/β-Ga2O3 Type-II p-n Heterojunctions

被引:102
作者
Gong, Hehe [1 ]
Chen, Xuanhu [1 ]
Xu, Yang [1 ]
Chen, Yanting [1 ]
Ren, Fangfang [1 ,2 ]
Liu, Bin [1 ]
Gu, Shulin [1 ]
Zhang, Rong [1 ]
Ye, Jiandong [1 ,2 ]
机构
[1] Nanjing Univ, Sch Elect Sci & Engn, Nanjing 210023, Peoples R China
[2] Nanjing Univ, Res Inst Shenzhen, Shenzhen 518000, Peoples R China
关键词
Band alignment; band bending; carrier transport; gallium oxide; p-n heterojunction (HJ); NIO THIN-FILM; ELECTRONIC-STRUCTURE; OXIDE; FABRICATION; CAPACITANCE; DIODES;
D O I
10.1109/TED.2020.3001249
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Engineering oxide interfaces with defined electronic band structures is of vital importance for designing all-oxide devices with controllable multifunctionality and improved performance. Here, we report the band alignment, band bending, and transport mechanism in the NiO/beta-Ga2O3 p-n heterojunction (HJ) which exhibits high performances with a rectification ratio over 10(11), a turn-on voltage of 1.87 V and specific ON-resistance of 10.2 m Omega.cm(2). A type-II band alignment is identified at NiO/beta-Ga2O3 HJs with a valence band offset of 3.60 eV and a conduction band offset of 2.68 eV, respectively, determined from the depth-profiled X-ray photoelectron spectroscopic analysis. Besides band edge discontinuity, an additional built-in potential of 0.78 V is observed at the interface due to the charge transfer across the p-n-junction. In comparison, the NiO/beta-Ga2O3 p-n HJ has lower leakage current and higher breakdown voltage than that of the Ni/Ga2O3 Schottky barrier diode. Capacitance-frequency analysis indicates the presence of interfacial states, and interface recombination is the dominant transport mechanism. The type-II NiO/Ga2O3 HJ provides favorable energetics for facile separation and transportation of photogenerated electrons and holes, which is important for all-oxide devices that require bipolar operation and power devices with higher conversion efficiencies.
引用
收藏
页码:3341 / 3347
页数:7
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