Fabrication of Optical Device Arrays Using Patterned Growth of ZnO Nanostructures

被引:4
|
作者
Mazloumi, Mahyar [1 ]
Mandal, Himadri S. [1 ]
Tang, Xiaowu [1 ]
机构
[1] Univ Waterloo, Dept Chem, Waterloo, ON N2L 3G1, Canada
关键词
Lithography; micro/nanodevice fabrication; optoelectronics; patterned growth; ZnO; FLOWER-LIKE; MICROWAVE; PERFORMANCE; MORPHOLOGY;
D O I
10.1109/TNANO.2012.2183885
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
An on-site catalyst-free and seedless synthesis method is presented for patterned growth of ZnO nanostructures and easy integration into arrayed microdevices. The optoelectronic ZnO devices, exhibiting Schottky diode behavior, are highly sensitive to UV illumination. We demonstrate that the patterned synthesis method combined with conventional lithography provides a facile way of fabricating arrayed UV sensory or switch devices with large on/off ratio and rapid on/off response.
引用
收藏
页码:444 / 447
页数:4
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