Synthesis of Three-Dimensional Phase Images of Nanoobjects: Numerical Simulation

被引：3

作者：

Levin, G. G. ^{[1
]}

Vishnyakov, G. N. ^{[1
]}

Ilyushin, Ya. A. ^{[2
,3
]}

机构：

[1] All Russia Sci Res Inst Opt Phys Measurements, Moscow 119361, Russia

[2] Moscow MV Lomonosov State Univ, Moscow 119992, Russia

[3] Russian Acad Sci, Inst Radioengn & Elect, Moscow 103907, Russia

来源：

OPTICS AND SPECTROSCOPY | 2013年 / 115卷 / 06期

关键词：

MAXWELLS EQUATIONS;

D O I：

10.1134/S0030400X1311012X

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A way to synthesize three-dimensional phase-diffraction images of nanoobjects is proposed based on the numerical method of backward propagation of a field from the best focusing plane. The obtained phase images are used for solving the applied problem of object defect finding by methods of pattern recognition. The probability of defect detection by phase images is shown to be higher than for amplitude images.

引用

页码：938 / 946

页数：9

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