Electrode-Gap Effects on the Electron Density and Electron Temperature in Atmospheric Radio-Frequency Discharges

被引:17
|
作者
Zhang, Yuantao T. [1 ]
Lou, Jie [1 ]
Li, Qingquan [1 ]
Li, Qingmin [1 ]
机构
[1] Shandong Univ, Sch Elect Engn, Shandong Prov Key Lab UHV Technol & Gas Discharge, Jinan 250061, Peoples R China
关键词
Atmospheric radio-frequency (rf) discharges; electron density; electron temperature; plasma simulation;
D O I
10.1109/TPS.2013.2244912
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The electrode-gap effects on discharge characteristics have attracted increasing attention in the design of atmospheric discharge devices. In this paper, a 1-D fluid model is used to explore the influences of electrode gap on the electron density and temperature of atmospheric radio-frequency discharges under a constant power density condition. As the electrode gap is increased, both the applied voltage and current density increase and the computational data and analytical equations show a monotonic increase in the electron density; the peak electron temperature in the sheath increases but decreases in the bulk plasma region. At a constant power density, altering the electrode gap can be used to tailor the spatial distribution of the electron density and electrode temperature.
引用
收藏
页码:414 / 420
页数:7
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