LTPS TFT Process on Polyimide Substrate for Flexible AMOLED

被引：117
作者：
Gao, Xiaoyu [1 ,2 ]
Lin, Li [1 ,2 ]
Liu, Yucheng [1 ,2 ]
Huang, Xiuqi [1 ,2 ]
机构：
[1] Kunshan New Flat Panel Display Technol Ctr Co Ltd, Nanning, Jiangsu, Peoples R China
[2] Visionox R&D Ctr, Kunshan 215300, Peoples R China
来源：
JOURNAL OF DISPLAY TECHNOLOGY | 2015年 / 11卷 / 08期
关键词：
Active-matrix organic light-emitting diode (AMOLED); flexible display; polyamide; ELECTRONICS; DISPLAYS;
D O I：
10.1109/JDT.2015.2419656
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
For conventional active-matrix organic light-emitting diode (AMOLED) flat panel displays, low temperature poly-silicon thin-film transistor (LTPS TFT) on rigid glass substrate process has already been well established. However, this technology cannot be applied directly on polyimide (PI) substrate for flexible display. This is because PI has the different coefficient of thermal expansion (CTE) from the glass, which will result in PI film peeling-off and/or warpage issues under conventional LTPS-TFT process technology. In this paper, a process flow of LTPS TFT on PI substrate for flexible display application was discussed. A flexible display demo system was successfully made by optimizing the LTPS TFT process.
引用
收藏
页码：666 / 669
页数：4
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