Synchronous laser scanning IR imaging for chip bonding defect inspection

被引:0
|
作者
Chen, Li [1 ]
Jiang, Haijun [1 ]
机构
[1] Novelteq Ltd, Nanjing, Jiangsu, Peoples R China
关键词
synchronous laser scanning IR imaging; thermal wave imaging; chip bonding inspection;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The quality of IC chip bonding directly affects the heat dissipation, which is especially important for high density or high power devices. The technique of synchronous laser scanning IR imaging utilizes a laser beam to apply periodic thermal excitation to IC chips and a progressive infrared camera records the temperature variation on the surface. By adjusting the synchronous relationship between the scanning of the laser and IR camera, the quick temperature variations can be captured and processed to unveil the thermal coupling defects. Compared with ultrasound microscopy, this technique is fast, non-contact, and non-contaminating, with images that directly represent the thermal dissipation capability of the devices.
引用
收藏
页码:448 / 450
页数:3
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