Effect of aluminium doping on zinc oxide thin films grown by spray pyrolysis

被引:102
|
作者
El Manouni, A
Manjón, FJ
Mollar, M
Marí, B
Gómez, R
López, MC
Ramos-Barrado, JR
机构
[1] Univ Politecn Valencia, Dept Fis Aplicada, E-46022 Valencia, Spain
[2] Univ Hassan 2, Fac Sci & Technol, Dept Phys, Mohammadia 20650, Morocco
[3] Univ Alicante, Dept Quim Fis, E-03080 Alicante, Spain
[4] Univ Alicante, Inst Univ Electroquim, E-03080 Alicante, Spain
[5] Univ Malaga, Dept Fis Aplicada, E-29071 Malaga, Spain
关键词
D O I
10.1016/j.spmi.2005.08.041
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
We report the structural, optical, and electrical characterization of aluminium-doped zinc oxide thin films grown by the spray pyrolysis method. We report the effect of Al concentration on the resistivity and on the X-ray diffraction, transmittance. photoluminescence and Raman scattering spectra of the films. The minimum resistivity is obtained for the sample with nominal Al concentration of 1%. An increase of the Al doping decreases the quality of the films. The loss of short-range order affects the photoluminescence and resistivity, although the optical transmittance is good, and the decrease of the long-range order affects X-ray diffraction and Raman spectra. (C) 2005 Elsevier Ltd. All rights reserved.
引用
收藏
页码:185 / 192
页数:8
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