A precision linear actuator using piezoelectrically driven friction force

A friction drive-type precision actuator which is capable of high positioning accuracy was developed by using piezoelectric elements. To anticipate dynamic behavior, system modeling was performed by using stick-slip friction models such as classical, Karnopp, and reset integrator. Dynamic characteristics over various types or driving input signals and driving conditions were investigated by simulation and experiment. By varying phase angle difference and amplitude of driving inputs, it was found that it is possible to control the moving direction and distance of the slider. From simulation and experimental results, it was observed that the dynamic behavior of the Simulation predictions agreed well with that of experimental results. This indicates that the model developed in this study is applicable to many other precision mechanisms in which driving friction force is generated by ellipsoidal motion. (C) 2001 Published by Elsevier Science Ltd.