A highly sensitive thermistor bolometer for a clinical tympanic thermometer

被引：9

作者：

Kudoh, T ^{[1
]}

Ikebe, S ^{[1
]}

Satow, H ^{[1
]}

Komatsu, K ^{[1
]}

Kimura, M ^{[1
]}

机构：

[1] TOHOKU GAKUIN UNIV,FAC ENGN,TAGAJO,MIYAGI 985,JAPAN

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1996年 / 55卷 / 01期

关键词：

infrared radiation sensors; miniature sensors; micromachining; clinical tympanic thermometers; micro-air-bridges; vacuum encapsulation;

D O I：

10.1016/S0924-4247(96)01243-5

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A newly designed infrared radiation sensor for a clinical tympanic thermometer has been developed. A very small packaging size (2.2 mm x 2.3 mm x 0.8 mm) is achieved so that the sensor can be used in the human auricle. To realize high sensitivity, infrared sensing regions in the shape of a pair of micro-air-bridges are encapsulated in a vacuum microchamber through a successive silicon batch process using micromachining techniques. The sensor shows a sensitivity R(v) of 5000 V W-1 and a noise equivalent temperature difference (NETD) of 0.062 degrees C at a d.c. bias voltage of 1.56 V.

引用

页码：13 / 17

页数：5

共 6 条

[1] CORE TEMPERATURE MEASURED IN THE AURICULAR CANAL - COMPARISON BETWEEN 4 DIFFERENT TYMPANIC THERMOMETERS [J].