ZrO2-TiO2 thin films and resonators for mid-infrared integrated photonics

被引：0

作者：

Jiang, Feipeng ^{[1
]}

Duan, Ningyuan ^{[1
]}

Lin, Hongtao ^{[2
]}

Li, Lan ^{[2
]}

Hu, Juejun ^{[2
]}

Bi, Lei ^{[1
]}

Lu, Haipeng ^{[1
]}

Weng, Xiaolong ^{[1
]}

Xie, Jianliang ^{[1
]}

Deng, Longjiang ^{[1
]}

机构：

[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Beijing, Peoples R China

[2] Univ Delaware, Dept Mat Sci & Engn, Newark, DE 19716 USA

来源：

2014 IEEE PHOTONICS SOCIETY SUMMER TOPICAL MEETING SERIES | 2014年

关键词：

Mid-infrared; thin films; optical resonators; chemical sensing; SILICON;

D O I：

10.1109/SUM.2014.27

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present a novel MIR transparent ZrO2-TiO2 thin film material system deposited at room temperature. Microdisk resonator showing high quality factor at 5.2 mu m wavelength is demonstrated, indicating their promising potential for integrated MIR photonic applications.

引用

页码：63 / 64

页数：2

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