共 50 条
[41]
High quality 3C-SiC for MOS applications
[J].
GALLIUM NITRIDE AND SILICON CARBIDE POWER TECHNOLOGIES,
2011, 41 (08)
:273-282
[43]
Transition metal impurities in 3C-SiC and 2H-SiC
[J].
PHYSICA B-CONDENSED MATTER,
2003, 340
:116-120
[44]
First-principles investigation of effects of defects on the physical properties of 3C-SiC under high temperatures and pressures
[J].
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T,
2022, 20
:3633-3645
[46]
Rapid Terahertz Imaging of Carrier Density of 3C-SiC
[J].
DEFECTS-RECOGNITION, IMAGING AND PHYSICS IN SEMICONDUCTORS XIV,
2012, 725
:57-+
[48]
Doping of 3C-SiC by implantation of nitrogen at high temperatures
[J].
Journal of Electronic Materials,
1997, 26
:123-127
[49]
Finite-element modeling of 3C-SiC membranes
[J].
2000 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS, TECHNICAL PROCEEDINGS,
2000,
:253-256