TiN-coating formation by pulsed Nd:YAG laser irradiation of titanium in nitrogen

被引：22

作者：

Hoeche, Daniel ^{[1
]}

Schikora, Hendrik ^{[1
]}

Zutz, Hayo ^{[1
]}

Emmel, Andreas ^{[2
]}

Queitsch, Robert ^{[3
]}

Schaaf, Peter ^{[1
]}

机构：

[1] Univ Gottingen, Inst Phys 2, D-37077 Gottingen, Germany

[2] FH Amberg Weiden, Lasertech, D-92224 Amberg, Germany

[3] ARGES GmbH, Ind Planung & Lasertech, D-92507 Nabburg, Germany

来源：

JOURNAL OF COATINGS TECHNOLOGY AND RESEARCH | 2008年 / 5卷 / 04期

关键词：

Titanium; Hardness; Melting depth; Laser synthesis; Titanium nitride; Coatings;

D O I：

10.1007/s11998-008-9093-9

中图分类号：

O69 [应用化学];

学科分类号：

081704 ;

摘要：

Titanium was treated by pulsed Nd:YAG laser irradiation in nitrogen atmosphere, which led to nitrogen in-diffusion and TiN coating formation. The thickness of the TiN films was about 1.2 mu m and the coatings had a universal hardness of about 11 GPa. The layers were investigated by X-ray diffraction at grazing incidence and resonant nuclear reaction analysis for nitrogen depth profiling. Fitting of the experimental depth profiles gave information about the physical processes (diffusion time and depth) with respect to the achieved hardness. The microscopic properties like lattice constants and the variation of the nitrogen content were evaluated. A relationship between laser scan parameters and coating properties could be revealed. Thus, it was possible to determine the physical limits such as film thickness, nitrogen content, and hardness of this direct laser synthesis.

引用

页码：505 / 512

页数：8

共 26 条

[1]

Bloyce A, 1994, SURFACE ENG TITANIUM

[2] THE MECHANICAL-PROPERTIES OF WEAR-RESISTANT COATINGS .2. EXPERIMENTAL STUDIES AND INTERPRETATION OF HARDNESS [J].

BURNETT, PJ ;

RICKERBY, DS .

THIN SOLID FILMS, 1987, 148 (01) :51-65

[3] Synthesis of highly oriented TiNx coatings by free-electron laser processing of titanium in nitrogen gas [J].

Carpene, E ;

Shinn, M ;

Schaaf, P .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2005, 80 (08) :1707-1710

[4] Mass transport mechanisms during excimer laser nitriding of aluminum [J].

Carpene, E ;

Schaaf, P .

PHYSICAL REVIEW B, 2002, 65 (22) :1-9

[5] EXAFS investigation of laser nitridation and laser carburization of silicon [J].

Carpene, E ;

Flank, AM ;

Traverse, A ;

Schaaf, P .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2002, 35 (12) :1428-1432

[6] Depth profiling characterisation of the surface layer obtained by pulsed Nd:YAG laser irradiation of titanium in nitrogen [J].

György, E ;

del Pino, AP ;

Serra, P ;

Morenza, JL .

SURFACE & COATINGS TECHNOLOGY, 2003, 173 (2-3) :265-270

[7] Surface nitridation of titanium by pulsed Nd:YAG laser irradiation [J].

György, E ;

del Pino, AP ;

Serra, P ;

Morenza, JL .

APPLIED SURFACE SCIENCE, 2002, 186 (1-4) :130-134

[8]

HOCHE D, APPL PHYS A IN PRESS

[9]

*JCPDS, ICDD PDF2 DAT 1997 P

[10] HARDNESS MEASUREMENTS OF THIN-FILMS [J].

JONSSON, B ;

HOGMARK, S .

THIN SOLID FILMS, 1984, 114 (03) :257-269

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