Near-Optimal Control of Atomic Force Microscope For Non-contact Mode Applications

被引：0

作者：

Sutton, Joshua L. ^{[1
]}

Boker, Almuatazbellah ^{[1
]}

Al Janaideh, Mohammad ^{[2
]}

机构：

[1] Virginia Tech, Bradley Dept Elect & Comp Engn, Blacksburg, VA 24061 USA

[2] Mem Univ, Dept Mech Engn, St John, NL, Canada

来源：

IFAC PAPERSONLINE | 2022年 / 55卷 / 27期

关键词：

Atomic force microscope; optimal control; singular perturbation; NONLINEAR DYNAMICS; AFM; DESIGN;

D O I：

10.1016/j.ifacol.2022.10.532

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A compact model representing the dynamics between piezoelectric voltage inputs and cantilever probe positioning, including nonlinear surface interaction forces, for atomic force microscopes (AFM) is considered. By considering relatively large cantilever stiffness, singular perturbation methods reduce complexity in the model and allows for faster responses to Van der Waals interaction forces. In this study, we outline a near-optimal feedback control approach for non-contact mode imaging designed to maintain the cantilever tip about the equilibrium point of the attraction and repulsion forces. The tracking control problem for AFM raster scanning along the lateral directions is also addressed. Copyright (c) 2022 The Authors. This is an open access article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0/)

引用

页码：317 / 322

页数：6

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