Near-Optimal Control of Atomic Force Microscope For Non-contact Mode Applications

被引：0

作者：

Sutton, Joshua L. ^{[1
]}

Boker, Almuatazbellah ^{[1
]}

Al Janaideh, Mohammad ^{[2
]}

机构：

[1] Virginia Tech, Bradley Dept Elect & Comp Engn, Blacksburg, VA 24061 USA

[2] Mem Univ, Dept Mech Engn, St John, NL, Canada

来源：

IFAC PAPERSONLINE | 2022年 / 55卷 / 27期

关键词：

Atomic force microscope; optimal control; singular perturbation; NONLINEAR DYNAMICS; AFM; DESIGN;

D O I：

10.1016/j.ifacol.2022.10.532

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

A compact model representing the dynamics between piezoelectric voltage inputs and cantilever probe positioning, including nonlinear surface interaction forces, for atomic force microscopes (AFM) is considered. By considering relatively large cantilever stiffness, singular perturbation methods reduce complexity in the model and allows for faster responses to Van der Waals interaction forces. In this study, we outline a near-optimal feedback control approach for non-contact mode imaging designed to maintain the cantilever tip about the equilibrium point of the attraction and repulsion forces. The tracking control problem for AFM raster scanning along the lateral directions is also addressed. Copyright (c) 2022 The Authors. This is an open access article under the CC BY-NC-ND license (https://creativecommons.org/licenses/by-nc-nd/4.0/)

引用

页码：317 / 322

页数：6

共 25 条

[1] Output-feedback control of precision motion systems with uncertain nonlinearities
Al Janaideh, Mohammad
Boker, Almuatazbellah M.
Rakotondrabe, Micky
[J]. MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2021, 153
[2] High-speed atomic force microscopy coming of age
Ando, Toshio
[J]. NANOTECHNOLOGY, 2012, 23 (06)
[3] Athans M., 1966, OPTIMAL CONTROL INTR
[4] Active fault tolerant control for high-precision positioning of a non-contact mode uncertain atomic force microscopy
Cetin, Meric
Beyhan, Selami
[J]. TRANSACTIONS OF THE INSTITUTE OF MEASUREMENT AND CONTROL, 2020, 42 (14) : 2632 - 2644
[5] Imaging living cells surface and quantifying its properties at high resolution using AFM in QI™ mode
Chopinet, L.
Formosa, C.
Rols, M. P.
Duval, R. E.
Dague, E.
[J]. MICRON, 2013, 48 : 26 - 33
[6] A 2-STAGE LYAPUNOV-BELLMAN FEEDBACK DESIGN OF A CLASS OF NON-LINEAR SYSTEMS
CHOW, JH
KOKOTOVIC, PV
[J]. IEEE TRANSACTIONS ON AUTOMATIC CONTROL, 1981, 26 (03) : 656 - 663
[7] El Rifai K, 2005, IEEE INT CONF ROBOT, P157
[8] Calculation of the optimal imaging parameters for frequency modulation atomic force microscopy
Giessibl, FJ
Bielefeldt, H
Hembacher, S
Mannhart, J
[J]. APPLIED SURFACE SCIENCE, 1999, 140 (3-4) : 352 - 357
[9] Modeling piezoelectric stack actuators for control of micromanipulation
Goldfarb, M
Celanovic, N
[J]. IEEE CONTROL SYSTEMS MAGAZINE, 1997, 17 (03): : 69 - 79
[10] Quasi-monolithic integration of silicon-MEMS with piezoelectric actuators for high-speed non-contact atomic force microscopy
Guliyev, E.
Volland, B. E.
Sarov, Y.
Ivanov, Tzv
Klukowski, M.
Manske, E.
Rangelow, I. W.
[J]. MEASUREMENT SCIENCE AND TECHNOLOGY, 2012, 23 (07)

← 1 2 3 →