NANO-POROUS COATINGS FOR GAS RETENTION STUDIES

被引：0
作者：
Ruset, C. [1 ]
Grigore, E. [1 ]
Rasinski, M. [2 ]
Fortuna, E. [2 ]
Grzonka, J. [2 ,5 ]
Gherendi, M. [1 ]
Luculescu, C. [1 ]
Barradas, N. P. [3 ]
Alves, E. [3 ]
Hakola, A. [4 ]
机构：
[1] Natl Inst Laser Plasma & Radiat Phys, Atomistilor St, Magurele 077125, Romania
[2] Warsaw Univ Technol, Fac Mat Sci & Engn, Woloska 141 St, PL-02507 Warsaw, Poland
[3] Univ Lisbon, Inst Super Tecn, IPFN, Av Rovisco Pais, P-1049001 Lisbon, Portugal
[4] VTT Tech Res Ctr Finland, POB 1000, FI-02044 Espoo, Finland
[5] Inst Elect Mat Technol, Wolczynska 133, PL-01919 Warsaw, Poland
来源：
ROMANIAN REPORTS IN PHYSICS | 2019年 / 71卷 / 01期
基金：
欧盟地平线“2020”;
关键词：
nano-porous coatings; tungsten; argon; ION-IMPLANTATION;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mu m in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950 degrees C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9. 10(20) atoms/m(2) while in compact W coating of the same thickness only 2.7. 10(19) atoms/m(2) it was found.
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页数：10
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