NANO-POROUS COATINGS FOR GAS RETENTION STUDIES

被引：0

作者：

Ruset, C. ^{[1
]}

Grigore, E. ^{[1
]}

Rasinski, M. ^{[2
]}

Fortuna, E. ^{[2
]}

Grzonka, J. ^{[2
,5
]}

Gherendi, M. ^{[1
]}

Luculescu, C. ^{[1
]}

Barradas, N. P. ^{[3
]}

Alves, E. ^{[3
]}

Hakola, A. ^{[4
]}

机构：

[1] Natl Inst Laser Plasma & Radiat Phys, Atomistilor St, Magurele 077125, Romania

[2] Warsaw Univ Technol, Fac Mat Sci & Engn, Woloska 141 St, PL-02507 Warsaw, Poland

[3] Univ Lisbon, Inst Super Tecn, IPFN, Av Rovisco Pais, P-1049001 Lisbon, Portugal

[4] VTT Tech Res Ctr Finland, POB 1000, FI-02044 Espoo, Finland

[5] Inst Elect Mat Technol, Wolczynska 133, PL-01919 Warsaw, Poland

来源：

ROMANIAN REPORTS IN PHYSICS | 2019年 / 71卷 / 01期

基金：

欧盟地平线“2020”;

关键词：

nano-porous coatings; tungsten; argon; ION-IMPLANTATION;

D O I：

暂无

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

One way to produce coatings with high gas retaining capability is to manipulate their structure towards a nano-porous one. Combined Magnetron Sputtering and Ion Implantation (CMSII) technique was used to produce pores of 1-10 nm in tungsten layers of about 1 mu m in thickness. STEM, EDX, RBS, TDS and GDOES techniques were used for analyses of these layers. By heating the layer at 950 degrees C the pores size increased up to 30 nm. The total amount of Ar retained in these layers was 3.9. 10(20) atoms/m(2) while in compact W coating of the same thickness only 2.7. 10(19) atoms/m(2) it was found.

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页数：10

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