Electrical characteristics of micro-hollow cathode discharges
被引:11
作者:
Lazzaroni, C.
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机构:
Univ Paris 13, CNRS, LSPM, Sorbonne Paris Cite, F-93430 Villetaneuse, FranceUniv Paris 13, CNRS, LSPM, Sorbonne Paris Cite, F-93430 Villetaneuse, France
Lazzaroni, C.
[1
]
Chabert, P.
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机构:
Univ Paris 11, Ecole Polytech, CNRS, LPP,UPMC, F-91128 Palaiseau, FranceUniv Paris 13, CNRS, LSPM, Sorbonne Paris Cite, F-93430 Villetaneuse, France
Chabert, P.
[2
]
机构:
[1] Univ Paris 13, CNRS, LSPM, Sorbonne Paris Cite, F-93430 Villetaneuse, France
[2] Univ Paris 11, Ecole Polytech, CNRS, LPP,UPMC, F-91128 Palaiseau, France
A cathode sheath model of micro-hollow cathode discharges is proposed to calculate the voltage-current characteristics and discuss the physics of the discharge resistance. Three different approaches are compared: (i) a self-consistent model where the electric field is determined self-consistently with the electron flux, (ii) a matrix sheath model where the electric field profile in the sheath is imposed, (iii) a constant electric field model where the electric field in the sheath is assumed to be equal to a constant fraction of the electric field at the cathode. The sheath size is found to decrease with the pressure, the voltage and the secondary emission coefficient. There is a strong effect of the secondary emission coefficient and the pressure on the voltage-current characteristics. The discharge resistance is found to be several hundreds of k Omega and decreases with the discharge current, the pressure and the secondary emission coefficient. A comparison between the matrix sheath model and experiments suggests that both the secondary emission coefficient and the surface area on which the current is collected at the cathode increase with the discharge current. This increase is related to a transition between a discharge confined in the hole at low current and a plasma abruptly expanded on the cathode backside at higher current.