Polymer pen lithography

被引：445

作者：

Huo, Fengwei ^{[1
,2
]}

Zheng, Zijian ^{[1
,2
]}

Zheng, Gengfeng ^{[1
,2
]}

Giam, Louise R. ^{[2
,3
]}

Zhang, Hua ^{[1
,2
]}

Mirkin, Chad A. ^{[1
,2
,3
]}

机构：

[1] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA

[2] Northwestern Univ, Int Inst Nanotechnol, Evanston, IL 60208 USA

[3] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA

来源：

SCIENCE | 2008年 / 321卷 / 5896期

关键词：

D O I：

10.1126/science.1162193

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We report a low- cost, high- throughput scanning probe lithography method that uses a soft elastomeric tip array, rather than tips mounted on individual cantilevers, to deliver inks to a surface in a "direct write" manner. Polymer pen lithography merges the feature size control of dip- pen nanolithography with the large- area capability of contact printing. Because ink delivery is time and force dependent, features on the nanometer, micrometer, and macroscopic length scales can be formed with the same tip array. Arrays with as many as about 11 million pyramid- shaped pens can be brought into contact with substrates and readily leveled optically to ensure uniform pattern development.

引用

页码：1658 / 1660

页数：3

共 29 条

[1] Imprint lithography with 25-nanometer resolution [J].

Chou, SY ;

Krauss, PR ;

Renstrom, PJ .

SCIENCE, 1996, 272 (5258) :85-87

[2] Direct patterning of modified oligonucleotides on metals and insulators by dip-pen nanolithography [J].

Demers, LM ;

Ginger, DS ;

Park, SJ ;

Li, Z ;

Chung, SW ;

Mirkin, CA .

SCIENCE, 2002, 296 (5574) :1836-1838

[3] New approaches to nanofabrication: Molding, printing, and other techniques [J].

Gates, BD ;

Xu, QB ;

Stewart, M ;

Ryan, D ;

Willson, CG ;

Whitesides, GM .

CHEMICAL REVIEWS, 2005, 105 (04) :1171-1196

[4] Patterning: Principles and some new developments [J].

Geissler, M ;

Xia, YN .

ADVANCED MATERIALS, 2004, 16 (15) :1249-1269

[5] The evolution of dip-pen nanolithography [J].

Ginger, DS ;

Zhang, H ;

Mirkin, CA .

ANGEWANDTE CHEMIE-INTERNATIONAL EDITION, 2004, 43 (01) :30-45

[6] A nanoplotter with both parallel and serial writing capabilities [J].

Hong, SH ;

Mirkin, CA .

SCIENCE, 2000, 288 (5472) :1808-1811

[7] Pushing the limits of lithography [J].

Ito, T ;

Okazaki, S .

NATURE, 2000, 406 (6799) :1027-1031

[8] Scanning probe lithography using self-assembled monolayers [J].

Krämer, S ;

Fuierer, RR ;

Gorman, CB .

CHEMICAL REVIEWS, 2003, 103 (11) :4367-4418

[9] FEATURES OF GOLD HAVING MICROMETER TO CENTIMETER DIMENSIONS CAN BE FORMED THROUGH A COMBINATION OF STAMPING WITH AN ELASTOMERIC STAMP AND AN ALKANETHIOL INK FOLLOWED BY CHEMICAL ETCHING [J].

KUMAR, A ;

WHITESIDES, GM .

APPLIED PHYSICS LETTERS, 1993, 63 (14) :2002-2004

[10] Protein nanoarrays generated by dip-pen nanolithography [J].

Lee, KB ;

Park, SJ ;

Mirkin, CA ;

Smith, JC ;

Mrksich, M .

SCIENCE, 2002, 295 (5560) :1702-1705

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