Study on Repetitive PID Control of Linear Motor in Wafer Stage of Lithography

被引：8

作者：

Hou, Bo-jie ^{[1
]}

Gao, Jian-she ^{[1
]}

Li, Xiao-qing

Zhou, Yun-fei

机构：

[1] Zhengzhou Univ, Sch Mech Engn, Zhengzhou 450001, Peoples R China

来源：

2012 INTERNATIONAL WORKSHOP ON INFORMATION AND ELECTRONICS ENGINEERING | 2012年 / 29卷

关键词：

repetitive control; lithography; wafer stage; linear motor; PID control; SERVO SYSTEM; DESIGN;

D O I：

10.1016/j.proeng.2012.01.585

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

A 'Repetitive + PID + feedforward' control mode is proposed to improve the trajectory-tracking performance of linear motors in wafer stage of lithography. The positioning error of linear motor is decreased greatly compared to PID control and 'PID + feedforward' control. The contradiction of high speed and high positioning accuracy has been solved. The results of MATLAB simulation and experiments demonstrated the effectiveness of the proposed methods. (C) 2011 Published by Elsevier Ltd. Selection and/or peer-review under responsibility of Harbin University of Science and Technology

引用

页码：3863 / 3867

页数：5

共 50 条

[21] The Design of a self improving PID controller with a Repetitive-Control Plugin
Mosuwan, Anon
Pora, Wanchalerm
2015 12TH INTERNATIONAL CONFERENCE ON ELECTRICAL ENGINEERING/ELECTRONICS, COMPUTER, TELECOMMUNICATIONS AND INFORMATION TECHNOLOGY (ECTI-CON), 2015,
[22] Repetitive Control for Vibration Suppression of Bearingless Induction Motor
Ye, Xiaoting
Tang, Xiao
Xing, Kun
Wang, Haoran
Yao, Junyong
Zhang, Tao
IEEE ACCESS, 2024, 12 : 60532 - 60540
[23] Integrated Strategy of Permanent Magnet Linear Synchronous Motor Based on Sliding Mode Control and Repetitive Control
Wang, Limei
Chen, Jichao
PROCEEDINGS OF 2010 3RD IEEE INTERNATIONAL CONFERENCE ON COMPUTER SCIENCE AND INFORMATION TECHNOLOGY, VOL 9 (ICCSIT 2010), 2010, : 652 - 655
[24] Parameter tuning of the wafer stage compensation feedforward controller of the lithography machine
Liu T.
Yang K.
Zhu Y.
Qinghua Daxue Xuebao/Journal of Tsinghua University, 2023, 63 (10): : 1640 - 1649
[25] Robust PID control of a linear mechanical axis: A case study
Dieulot, Jean-Yves
Colas, Frederic
MECHATRONICS, 2009, 19 (02) : 269 - 273
[26] Linear Motor Velocity and Acceleration Motion Control Study Based on PID plus Velocity and Acceleration Feedforward Parameters Adjustment
Peng, W. F.
Li, G. H.
Wu, P.
Tan, G. Y.
ADVANCES IN MATERIALS MANUFACTURING SCIENCE AND TECHNOLOGY XIV, 2012, 697-698 : 239 - +
[27] Remote PID Control of a DC Motor
Silva, V.
Carvalho, V.
Vasconcelos, R. M.
Soares, F.
INTERNATIONAL JOURNAL OF ONLINE ENGINEERING, 2007, 3 (03)
[28] Optimal feedforward control with a parametric structure applied to a wafer stage
Jiang, Yi
Yang, Kaiming
Zhu, Yu
Li, Xin
Yu, Dongdong
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART I-JOURNAL OF SYSTEMS AND CONTROL ENGINEERING, 2014, 228 (02) : 97 - 106
[29] The linear motor control based on ELVIS
Su Ang
Cao Rongmin
Zhou Huixing
PROCEEDINGS OF THE 2012 24TH CHINESE CONTROL AND DECISION CONFERENCE (CCDC), 2012, : 2505 - 2509
[30] ISTF-PID Based DC Servo Motor Control
Swami, Arjun
Gaur, Prema
2016 IEEE 7TH POWER INDIA INTERNATIONAL CONFERENCE (PIICON), 2016,

← 1 2 3 4 5 →