Investigation of the Effect of ITO Size and Mesa Shape on the Optoelectronic Properties of GaN-Based Micro LEDs

In this paper, in order to explore the influence of indium tin oxide (ITO) size and mesa shape on the performance of GaN-based micro light emitting diodes (Micro LEDs) on sapphire substrates, Micro LEDs of different sizes with ITO area smaller than or equal to the light-emitting area were designed and fabricated. The experiment results show that when the ITO area of the Micro LED is equal to the area of the light-emitting area, its optoelectronic performance is significantly better than that of the Micro LEDs whose ITO area is smaller than the area of the light-emitting area. When the light-emitting area size is 40 mu m, the wall-plug efficiency (WPE) of the two structures of Micro LEDs can differ by more than 50%. Based on above experiment results, this paper designed and fabricated Micro LEDs with different sizes of square and circular mesa with the same ITO area as the light-emitting area. The experimental results show that the WPE of the circular mesa Micro LED is slightly higher than that of the square mesa Micro LED at low current density. However, as the current density and chip size increase, the performance of the Micro LED with a square mesa is better.