Effect of atmospheric-pressure plasma jet on polycrystalline diamond micro-milling of silicon carbide

被引：48

作者：

Katahira, Kazutoshi ^{[1
]}

Ohmori, Hitoshi ^{[1
]}

Takesue, Shogo ^{[2
]}

Komotori, Jun ^{[2
]}

Yamazaki, Kazuo ^{[3
,4
]}

机构：

[1] RIKEN, Mat Fabricat Lab, Wako, Saitama 3510198, Japan

[2] Keio Univ, Dept Mech Engn, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

[3] Univ Calif Davis, Dept Mech & Aerosp Engn, Davis, CA 95616 USA

[4] Univ Calif Berkeley, Dept Mech Engn, Berkeley, CA 94720 USA

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2015年 / 64卷 / 01期

关键词：

Micro machining; Diamond tool; Silicon carbide;

D O I：

10.1016/j.cirp.2015.04.097

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A study was performed to investigate the effects of the application of an atmospheric-pressure plasma jet during polycrystalline diamond (PCD) micro- end-milling. A comparison was made between SIC surfaces after milling, with and without the application of the plasma jet. The plasma jet was found to allow the formation of a high-quality surface with an average roughness (R-a) of 0.73 nm. The proposed plasma jet is highly effective in improving both the chip formation process, by imparting hydrophilicity to the tool and workpiece surfaces, and removing surface contamination at the tool edge during machining. (C) 2015 CIRP.

引用

页码：129 / 132

页数：4

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