SIMULATION OF RADIATION EFFECTS IN ULTRA-THIN INSULATING LAYERS

被引：5
|
作者：
Timotijevic, Ljubinko B. [1 ]
Vujisic, Milos Lj [1 ]
Stankovic, Koviljka Dj. [1 ]
机构：
[1] Univ Belgrade, Fac Elect Engn, Belgrade 11001, Serbia
来源：
NUCLEAR TECHNOLOGY & RADIATION PROTECTION | 2013年 / 28卷 / 03期
关键词：
insulator proton; alpha particle; ion beam; radiation effect; Monte Carlo simulation; OXIDE; HARDNESS; EPROMS;
D O I：
10.2298/NTRP1303308T
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
The Monte Carlo simulations of charged particle transport are used to investigate the effects of exposing ultra-thin layers of insulators (commonly used in integrated circuits) to beams of protons, alpha particles and heavy ions. Materials considered include silicon dioxide, aluminum nitride, alumina, and polycarbonate - lexan. The parameters that have been varied in simulations include the energy of incident charged particles and insulating layer thickness. Materials are compared according to both ionizing and non-ionizing effects produced by the passage of radiation.
引用
收藏
页码：308 / 315
页数：8
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