Plasma Deposition of an Organophosphorus Coating at Atmospheric Pressure

被引：15
|
作者：
Hilt, Florian [1 ,2 ,3 ]
Duday, David [1 ]
Gherardi, Nicolas [2 ,3 ]
Frache, Gilles [1 ]
Bardon, Julien [4 ]
Choquet, Patrick [1 ]
机构：
[1] Ctr Rech Publ Gabriel Lippmann, L-4422 Belvaux, Luxembourg
[2] Univ Toulouse, LAPLACE Lab Plasma & Convers Energie, UPS, INPT, F-31062 Toulouse 9, France
[3] CNRS, LAPLACE, F-31062 Toulouse, France
[4] Ctr Rech Publ Henri Tudor, L-4940 Hautcharage, Luxembourg
来源：
PLASMA PROCESSES AND POLYMERS | 2013年 / 10卷 / 06期
关键词：
AP-DBD; FTIR; ToF-SIMS; Triethyl phosphate (TEP); XPS; DIELECTRIC-BARRIER DISCHARGES; INDUCED GRAFT-POLYMERIZATION; IONIC PHOSPHONATE GROUPS; SURFACE MODIFICATION; HYBRID MATERIALS; ANTICORROSIVE PROPERTIES; FILMS; PHOSPHATE; COPOLYMERIZATION; TEMPERATURE;
D O I：
10.1002/ppap.201300010
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Plasma polymerisation of an organophosphorus monomer in atmospheric pressure-dielectric barrier discharge was studied. Phosphate-based molecules were introduced as a vapour into a nitrogen plasma at atmospheric pressure and a phosphorus-containing coating was obtained. Scanning electron microscopy and ellipsometry revealed the morphology of the coating while Fourier transform infrared spectroscopy and X-ray photoelectron spectroscopy indicated a hybrid organic-inorganic coating containing phosphate, organophosphate and different N-containing groups. The new polymer structure of the coating was highlighted by secondary ion mass spectrometry.
引用
收藏
页码：556 / 563
页数：8
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