A Universal Core Model for Multiple-Gate Field-Effect Transistors. Part I: Charge Model

被引:46
作者
Duarte, Juan Pablo [1 ]
Choi, Sung-Jin [1 ]
Moon, Dong-Il [1 ]
Ahn, Jae-Hyuk [1 ]
Kim, Jee-Yeon [1 ]
Kim, Sungho [1 ]
Choi, Yang-Kyu [1 ]
机构
[1] Korea Adv Inst Sci & Technol, Dept Elect Engn, Taejon 305701, South Korea
关键词
Compact modeling; cylindrical gate-all-around FET (Cy-GAA-FET); double-gate FET (DG-FET); FinFET; multiple-gate FET (Mug-FET); Poisson's equation; rectangular gate-all-around FET (Re-GAA-FET); semiconductor device modeling; single-gate FET (SG-FET); triple-gate FET (TG-FET); EQUIVALENT OXIDE THICKNESS; HIGH-KAPPA INSULATORS; DRAIN-CURRENT MODEL; SOI MOSFETS; COMPACT MODEL; CHANNEL; DESIGN;
D O I
10.1109/TED.2012.2233478
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A universal core model for multiple-gate field-effect transistors (Mug-FETs) is proposed. The proposed charge and drain current models are presented in Parts I and II, respectively. It is first demonstrated that an exact potential profile in the entire channel is not necessary for the derivation of accurate charge models in inversion-mode FETs. With application of this new concept, a universal charge model is derived for Mug-FETs by assuming an arbitrary channel potential profile, which simplifies the mathematical formulation. Thereafter, using the Pao-Sah integral, a drain current model is obtained from the charge model of Part I. The proposed model can be expressed as an explicit and continuous form for all operation regimes; therefore, it is well suited for compact modeling to support fast circuit simulations. The model shows good agreement with 2-D and 3-D numerical simulations for several multiple-gate structures, such as single-gate, double-gate, triple-gate, rectangular gate-all-around, and cylindrical gate-all-around FETs.
引用
收藏
页码:840 / 847
页数:8
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