Fault Prediction Method Based on Data Mining in Semiconductor Test Line

被引：0

作者：

Yue, Renhong ^{[1
]}

Ma, Yumin ^{[1
]}

Qiao, Fei ^{[1
]}

Wu, Xinghao

机构：

[1] Tongji Univ, CIMS Res Ctr, Shanghai 201804, Peoples R China

来源：

MECHATRONICS AND INFORMATION TECHNOLOGY, PTS 1 AND 2 | 2012年 / 2-3卷

关键词：

Fault Prediction; Data Mining; Decision Support; Semiconductor Test;

D O I：

10.4028/www.scientific.net/AEF.2-3.706

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In semiconductor test system, test equipment all have a period of usage. When the test time of equipment is larger than its period of usage, its fault will occur. frequently. This paper will use data mining method to predict the next time point of fault based on the history data related to equipment fault. By this, a method of equipment fault prediction will be put forward, and provide the decision support for semiconductor equipment maintenance.

引用

页码：706 / 710

页数：5