A Theoretical and Experimental Study on Temperature Dependent Characteristics of Silicon MEMS Gyroscope Drive Mode

被引：5

作者：

Feng Rui ^{[1
]}

Qiu An-ping ^{[1
]}

Shi Qin ^{[1
]}

Su Yan ^{[1
]}

机构：

[1] Nanjing Univ Sci & Technol, Sch Mech Engn, Nanjing, Jiangsu, Peoples R China

来源：

MEMS, NANO AND SMART SYSTEMS, PTS 1-6 | 2012年 / 403-408卷

关键词：

Silicon micro gyroscope; drive modal frequency; temperature characteristics;

D O I：

10.4028/www.scientific.net/AMR.403-408.4237

中图分类号：

TP18 [人工智能理论];

学科分类号：

081104 ; 0812 ; 0835 ; 1405 ;

摘要：

The prototype of the silicon micro gyroscope is introduced. Temperature is the key factor that affects the performance of the gyroscope. In this paper, temperature dependent characteristics of silicon micro gyroscope drive mode is analyzed. The theoretical results show that temperature coefficient of the Young's modulus is the most critical factor that affects temperature characteristics of the silicon micro gyroscope's drive modal frequency and the frequency is proportional to the temperature. The results are verified by finite element simulations. The silicon micro gyroscopes are experimented in a high accurate thermostat. The drive modal frequency and temperature are measured and sampled. These experimental results show that the temperature coefficient of Young's modulus is the key factor and the frequency is proportional to the temperature. The theoretic analyses are also validated by the experiments.

引用

页码：4237 / 4243

页数：7

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