Solid source molecular beam epitaxial growth of In0.48Ga0.52P on GaAs substrates using a valved phosphorus cracker cell

被引:0
作者
Yoon, SF [1 ]
Mah, KW [1 ]
Zheng, HQ [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore
关键词
D O I
10.1051/epjap:1999205
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the molecular beam epitaxial growth of InGaP on GaAs (100) substrate using a valved phosphorus cracker cell at various substrate temperatures (T-s from 420 degrees C to 540 degrees C). Sample characterization was carried out using Raman scattering (RS), photoluminescence (PL) and X-ray diffraction (XRD). Surface morphology characterization was performed using scanning electron microscopy (SEM). Typical InGaP layers showed a lattice mismatch of < 10(-3) and PL full-width at half maximum (FWHM) of similar to 7 meV at 10 K. The Raman spectrum showed peaks at 30 cm(-1), 360 cm(-1) and 380 cm(-1) corresponding to the transverse-optic (TO), InP-like longitudinal-optic (LO) and GaP-like LO modes, respectively. No Raman signals were detected from the sample grown at substrate temperature (T-s) of 540 OC, due to poor surface morphology arising from indium desorption. A marginal increase in ordering, as evidenced from the slight decrease (similar to 30 meV) in the PL peak energy nias seen in samples grown at increasing substrate temperature. Furthermore, no significant variation in the FWHM of the LO modes, TO mode and intensity ratio of the TO mode to the InP-like LO made were observed, suggesting that any ordering in the material grown using this technique is weak.
引用
收藏
页码:111 / 117
页数:7
相关论文
共 25 条
  • [1] RAMAN-SCATTERING IN INGAAIP LAYERS GROWN BY MOLECULAR-BEAM EPITAXY
    ASAHI, H
    EMURA, S
    GONDA, S
    KAWAMURA, Y
    TANAKA, H
    [J]. JOURNAL OF APPLIED PHYSICS, 1989, 65 (12) : 5007 - 5011
  • [2] MOLECULAR-BEAM EPITAXIAL-GROWTH OF GAXIN1-XP-GAAS (X-SIMILAR-TO-0.5) DOUBLE-HETEROJUNCTION LASER-DIODES USING SOLID PHOSPHORUS AND ARSENIC VALVED CRACKING CELLS
    BAILLARGEON, JN
    CHO, AY
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02): : 736 - 738
  • [3] HIGHLY CARBON-DOPED P-TYPE GA0.5IN0.5AS AND GA0.5IN0.5P BY CARBON-TETRACHLORIDE IN GAS-SOURCE MOLECULAR-BEAM EPITAXY
    CHIN, TP
    KIRCHNER, PD
    WOODALL, JM
    TU, CW
    [J]. APPLIED PHYSICS LETTERS, 1991, 59 (22) : 2865 - 2867
  • [4] OPERATION AND DEVICE APPLICATIONS OF A VALVED-PHOSPHORUS CRACKER IN SOLID-SOURCE MOLECULAR-BEAM EPITAXY
    CHIN, TP
    CHANG, JCP
    WOODALL, JM
    CHEN, WL
    HADDAD, GI
    PARKS, C
    RAMDAS, AK
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02): : 750 - 753
  • [5] MG DOPING OF GAINP GROWN BY CHEMICAL BEAM EPITAXY USING BIS-CYCLOPENTADIENYL MAGNESIUM
    COURMONT, S
    MAUREL, P
    GRATTEPAIN, C
    GARCIA, JC
    [J]. APPLIED PHYSICS LETTERS, 1994, 64 (11) : 1371 - 1373
  • [6] BAND-GAP OF COMPLETELY DISORDERED GA0.52IN0.48P
    DELONG, MC
    MOWBRAY, DJ
    HOGG, RA
    SKOLNICK, MS
    WILLIAMS, JE
    MEEHAN, K
    KURTZ, SR
    OLSON, JM
    SCHNEIDER, RP
    WU, MC
    HOPKINSON, M
    [J]. APPLIED PHYSICS LETTERS, 1995, 66 (23) : 3185 - 3187
  • [7] BAND-GAP REDUCTION AND VALENCE-BAND SPLITTING OF ORDERED GAINP2
    ERNST, P
    GENG, C
    SCHOLZ, F
    SCHWEIZER, H
    ZHANG, Y
    MASCARENHAS, A
    [J]. APPLIED PHYSICS LETTERS, 1995, 67 (16) : 2347 - 2349
  • [8] EVIDENCE FOR THE EXISTENCE OF AN ORDERED STATE IN GA0.5IN0.5P GROWN BY METALORGANIC VAPOR-PHASE EPITAXY AND ITS RELATION TO BAND-GAP ENERGY
    GOMYO, A
    SUZUKI, T
    KOBAYASHI, K
    KAWATA, S
    HINO, I
    YUASA, T
    [J]. APPLIED PHYSICS LETTERS, 1987, 50 (11) : 673 - 675
  • [9] Semi-insulating In0.49Ga0.51P grown at reduced substrate temperature by low-pressure metalorganic chemical vapor deposition
    Hartmann, QJ
    Gardner, NF
    Horton, TU
    Curtis, AP
    Ahmari, DA
    Fresina, MT
    Baker, JE
    Stillman, GE
    [J]. APPLIED PHYSICS LETTERS, 1997, 70 (14) : 1822 - 1824
  • [10] HORI H, 1993, SEMICOND REL COMP, V129, P103