MICROASSEMBLY OF MEMS ACTUATORS AND SENSORS VIA MICRO-MASONRY

被引：0

作者：

Zhang, Y. ^{[1
]}

Keum, H. ^{[1
]}

Kim, S. ^{[1
]}

机构：

[1] Univ Illinois, Urbana, IL USA

来源：

26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013) | 2013年

关键词：

SCANNING-ELECTRON-MICROSCOPE; ADHESION; MICROMANIPULATION; ROBOTS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Micro-masonry is a microassembly technique that is based on transfer printing and direct bonding. This paper presents the assembly of MEMS mechanical sensors and actuators based on this micro-masonry technique. Micro-fabrication processes for retrievable MEMS components (e.g., combs, flexure beams, and metal pads) are developed. As manipulation tools, elastomeric microtipped stamps with switchable dry adhesion are also designed and fabricated to pick up and place those components. After the assembly, the components are permanently bonded together via rapid thermal annealing. The sensing and actuating capabilities of the assembled MEMS devices are characterized.

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页码：283 / 286

页数：4

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