In situ atomic force microscopy observation of dissolution process of Si(111) in oxygen-free water at room temperature

被引：21
|
作者：
Fukidome, H [1 ]
Matsumura, M
Komeda, T
Namba, K
Nishioka, Y
机构：
[1] Osaka Univ, Res Ctr Photoenerget Organ Mat, Osaka 5608531, Japan
[2] Inst Phys & Chem Res, Wako, Saitama 3510198, Japan
[3] Texas Instruments Inc, Tsukuba Res & Dev Ctr, Ibaraki, Osaka 3050841, Japan
来源：
ELECTROCHEMICAL AND SOLID STATE LETTERS | 1999年 / 2卷 / 08期
关键词：
D O I：
10.1149/1.1390848
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Si(111) surfaces were found to be easily flattened on an atomic scale by a treatment with water from which oxygen was removed by addition of a chemical deoxygenator. By in situ atomic force microscope measurements of the Si(111) surface, we succeeded for the first time in observing the flow of the steps on the atomically flattened Si(111) surface in oxygen-free water. The average step-flow rate was estimated to be 8 nm/min at room temperature. (C) 1999 The Electrochemical Society. S1099-0062(98)12-022-9. All rights reserved.
引用
收藏
页码：393 / 394
页数：2
相关论文
共 45 条
  • [1] A very simple method of flattening Si(111) surface at an atomic level using oxygen-free water
    Fukidome, H
    Matsumura, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1999, 38 (10A): : L1085 - L1086
  • [2] OBSERVATION OF STEP FORMATION ON VICINAL SI(111) SURFACES BY ATOMIC FORCE MICROSCOPY
    SUZUKI, M
    HOMMA, Y
    KUDOH, Y
    KANEKO, R
    ULTRAMICROSCOPY, 1992, 42 : 940 - 945
  • [3] In situ atomic force microscopy observation of lithium deposition at an elevated temperature
    Mogi, R
    Inaba, M
    Abe, T
    Ogumi, Z
    JOURNAL OF POWER SOURCES, 2001, 97-8 : 265 - 268
  • [4] In situ observation of growth process of α-L-glutamic acid with atomic force microscopy
    Kitamura, M
    Onuma, K
    JOURNAL OF COLLOID AND INTERFACE SCIENCE, 2000, 224 (02) : 311 - 316
  • [5] In situ observation of Cu electrodeposition and dissolution on Au(100) by high- speed atomic force microscopy
    Yoshioka, Taiki
    Matsushima, Hisayoshi
    Ueda, Mikito
    ELECTROCHEMISTRY COMMUNICATIONS, 2018, 92 : 29 - 32
  • [6] Oxidation of Molybdenum Disulfide Sheet in Water under in Situ Atomic Force Microscopy Observation
    Zhang, Xian
    Jia, Feifei
    Yang, Bingqiao
    Song, Shaoxian
    JOURNAL OF PHYSICAL CHEMISTRY C, 2017, 121 (18): : 9938 - 9943
  • [7] Quantification of the resist dissolution process: an in situ analysis using high speed atomic force microscopy
    Santillan, Julius Joseph
    Shichiri, Motoharu
    Itani, Toshiro
    ADVANCES IN PATTERNING MATERIALS AND PROCESSES XXXIII, 2016, 9779
  • [8] Observation of Subsurface Atoms of the Si(111)-(7x7) Surface by Atomic Force Microscopy
    Sawada, Daisuke
    Sugimoto, Yoshiaki
    Abe, Masayuki
    Morita, Seizo
    APPLIED PHYSICS EXPRESS, 2010, 3 (11)
  • [9] The dissolution of laumontite in acidic aqueous solutions: A controlled-temperature in situ atomic force microscopy study
    Voltolini, Marco
    Artioli, Gilberto
    Moret, Massimo
    AMERICAN MINERALOGIST, 2012, 97 (01) : 150 - 158
  • [10] Real time observation by atomic force microscopy of spontaneous recrystallization at room temperature in electrodeposited copper metallization
    Buckley, DN
    Ahmed, S
    ELECTROCHEMICAL AND SOLID STATE LETTERS, 2003, 6 (03) : C33 - C37
12345