Aluminum nitride integrated photonics platform for the ultraviolet to visible spectrum

被引：138

作者：

Lu, Tsung-Ju ^{[1
]}

Fanto, Michael ^{[2
,3
]}

Choi, Hyeongrak ^{[1
]}

Thomas, Paul ^{[2
]}

Steidle, Jeffrey ^{[2
]}

Mouradian, Sara ^{[1
]}

Kong, Wei ^{[4
]}

Zhu, Di ^{[1
]}

Moon, Hyowon ^{[1
]}

Berggren, Karl ^{[1
]}

Kim, Jeehwan ^{[4
]}

Soltani, Mohammad ^{[5
]}

Preble, Stefan ^{[2
]}

Englund, Dirk ^{[1
]}

机构：

[1] MIT, Dept Elect Engn & Comp Sci, Cambridge, MA 02139 USA

[2] Rochester Inst Technol, Microsyst Engn, Rochester, NY 14623 USA

[3] US Air Force, Res Lab, Rome, NY 13441 USA

[4] MIT, Dept Engn Mech, Cambridge, MA 02139 USA

[5] Raytheon BBN Technol, Cambridge, MA 02138 USA

来源：

OPTICS EXPRESS | 2018年 / 26卷 / 09期

关键词：

WAVE-GUIDES; SILICON-NITRIDE; MICRORING RESONATOR; OPTICAL-PROPERTIES; NONLINEAR OPTICS; THIN-FILM; GENERATION; FREQUENCY; ALN; MICRORESONATORS;

D O I：

10.1364/OE.26.011147

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate a wide-bandgap semiconductor photonics platformbased on nanocrystalline aluminum nitride (AlN) on sapphire. This photonics platform guides light at low loss from the ultraviolet (UV) to the visible spectrum. We measure ring resonators with intrinsic quality factor (Q) exceeding 170,000 at 638 nm and Q > 20,000 down to 369.5 nm, which shows a promising path for low-loss integrated photonics in UV and visible spectrum. This platform opens up new possibilities in integrated quantum optics with trapped ions or atom-like color centers in solids, as well as classical applications including nonlinear optics and on-chip UV-spectroscopy. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

引用

页码：11147 / 11160

页数：14

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