Low-k Mesoporous Pure Silica Zeolite with High Elastic Modulus Using 1,3,5,7-Tetra-Methyl-Cyclo-Tetra-Siloxane and Ultraviolet Treatments

被引：5

作者：

Sato, Tadashi ^{[1
]}

Yamamoto, Takafumi ^{[1
]}

Hata, Yuki ^{[1
]}

Seino, Yutaka ^{[2
]}

Kayaba, Yasuhisa ^{[3
]}

Kuroki, Shin-Ichiro ^{[1
]}

Kikkawa, Takamaro ^{[1
]}

机构：

[1] Hiroshima Univ, Res Inst Nanodevice & Bio Syst, Higashihiroshima 7398527, Japan

[2] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058569, Japan

[3] Mitsui Chem Co, Sodegaura, Chiba 2990265, Japan

来源：

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 2013年 / 2卷 / 04期

关键词：

ELECTRICAL CHARACTERISTICS;

D O I：

10.1149/2.018304jss

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A low-k pure silica zeolite film with high-elastic modulus was obtained by hydrothermal synthesis. A two-step hydrothermal synthesis method was used for spin-coated zeolite suspension, followed by nitrogen (N-2) annealing at 400 degrees C. 1,3,5,7-tetramethylcyclotetrasiloxane (TMCTS) silylation treatment and ultraviolet (UV) light (lambda = 172 nm) irradiation was then carried out to promote wear. The effects of the zeolite suspension grain size formed by hydrothermal synthesis on electrical performance and elastic modulus are investigated. Both a high elastic modulus of 5.7 GPa and a low dielectric constant (k = 1.9) were achieved. Moreover, a leakage current density of 10(-9) A/cm(2) at 2 MV/cm was attained. (C) 2013 The Electrochemical Society. All rights reserved.

引用

页码：N89 / N92

页数：4