Obtaining and doping of InAs-QD/GaAs(001) nanostructures by ion beam sputtering

被引：3

作者：

Chebotarev, Sergei N. ^{[1
,2
]}

Pashchenko, Alexander S. ^{[2
]}

Lunin, Leonid S. ^{[2
]}

Zhivotova, Elena N. ^{[1
]}

Erimeev, Georgy A. ^{[1
]}

Lunina, Marina L. ^{[2
]}

机构：

[1] Platov South Russian State Polytech Univ NPI, Dept Phys & Elect, 132 Prosveshchenia Str, Novocherkassk 346428, Russia

[2] Russian Acad Sci, Dept Nanotechnol & Solar Energy, Southern Sci Ctr, 41 Chekhov Ave, Rostov Na Donu 344006, Russia

来源：

BEILSTEIN JOURNAL OF NANOTECHNOLOGY | 2017年 / 8卷

基金：

俄罗斯基础研究基金会;

关键词：

3D growth; doping; ion-beam sputtering; photoluminescence; quantum dots; QUANTUM DOTS; GAAS; DEPOSITION; SEGREGATION; GROWTH; CRYSTALLIZATION; INAS/GAAS(001); TEMPERATURE; GERMANIUM; SPECTRUM;

D O I：

10.3762/bjnano.8.2

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The features of InAs quantum dots obtained on GaAs(001) single-crystal substrates by ion-beam sputtering were investigated. It has been shown that in the range of ion energies of 150 to 200 eV at a temperature of 500 degrees C and a beam current of 120 mu A InAs quantum dots with average dimensions below 15 nm and a surface density of 10(11) cm(-2) are formed. The technique of controlled doping of InAs/GaAs nanostructures using a SnTe solid-state source was proposed. It has been established that a maximum donor concentration of 8.7 . 10(18) cm(-3) in the GaAs spacer layer is reached at an evaporation temperature of 415 degrees C. At the same time, impurity accumulation in the growth direction was observed. We have shown that increasing the impurity doping of the GaAs barrier layer increases the intensity of photoluminescence peaks of the ground state and the first excited state of the InAs quantum dots.

引用

页码：12 / 20

页数：9

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