Thickness Shear Vibration of ZnO Thin Film with Dissipation

被引：0

作者：

Du, Jianke ^{[1
]}

Fu, Xian ^{[1
]}

Lou, Jia ^{[1
]}

Huang, Bin ^{[1
]}

Wang, Ji ^{[1
]}

机构：

[1] Ningbo Univ, Sch Mech Engn & Mech, Ningbo 315211, Zhejiang, Peoples R China

来源：

2016 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM (IFCS) | 2016年

关键词：

piezoelectric; thickness shear vibration; viscous dissipation; thin film; RESONATORS;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Thickness shear vibration of ZnO thin film with consideration of viscosity effects is investigated. The Kelvin mode is used to describe the viscosity of the materials. Based on the three-dimensional piezoelectric theory, the governing equations of ZnO thin film are obtained. The calculation results are presented and discussed in detail.

引用

页码：96 / 99

页数：4

共 8 条

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