Negative permittivity of ZnO thin films prepared from aluminum and gallium doped ceramics via pulsed-laser deposition

被引:26
作者
Bodea, M. A. [1 ]
Sbarcea, G. [1 ,2 ,3 ]
Naik, G. V. [4 ,5 ]
Boltasseva, A. [4 ,5 ,6 ,7 ]
Klar, T. A. [1 ]
Pedarnig, J. D. [1 ]
机构
[1] Johannes Kepler Univ Linz, Inst Appl Phys, A-4040 Linz, Austria
[2] Univ Politehn Bucuresti, Bucharest 060042, Romania
[3] Natl Inst Res & Dev Elect Engn ICPE CA, Bucharest 030138, Romania
[4] Purdue Univ, Sch Elect & Comp Engn, W Lafayette, IN 47907 USA
[5] Purdue Univ, Birck Nanotechnol Ctr, W Lafayette, IN 47907 USA
[6] Tech Univ Denmark, DTU Foton, DK-2800 Lyngby, Denmark
[7] Univ Erlangen Nurnberg, Erlangen Grad Sch Adv Opt Technol SAOT, D-91052 Erlangen, Germany
来源
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2013年 / 110卷 / 04期
基金
欧洲研究理事会;
关键词
OPTICAL-PROPERTIES; PLASMONIC MATERIALS; SUBSTRATE; GROWTH;
D O I
10.1007/s00339-012-7198-6
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Aluminum and gallium doped zinc oxide thin films with negative dielectric permittivity in the near infrared spectral range are grown by pulsed laser deposition. Composite ceramics comprising ZnO and secondary phase Al2O3 or Ga2O3 are employed as targets for laser ablation. Films deposited on glass from dense and small-grained ceramic targets show optical transmission larger than 70 % in the visible and reveal an onset of metallic reflectivity in the near infrared at 1100 nm and a crossover to a negative real part of the permittivity at approximately 1500 nm. In comparison to noble metals, doped ZnO shows substantially smaller losses in the near infrared.
引用
收藏
页码:929 / 934
页数:6
相关论文
共 30 条
[21]   Pulsed laser deposition of thin films and superlattices based on ZnO [J].
Ohtomo, A ;
Tsukazaki, A .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (04) :S1-S12
[22]   A comprehensive review of ZnO materials and devices -: art. no. 041301 [J].
Ozgür, U ;
Alivov, YI ;
Liu, C ;
Teke, A ;
Reshchikov, MA ;
Dogan, S ;
Avrutin, V ;
Cho, SJ ;
Morkoç, H .
JOURNAL OF APPLIED PHYSICS, 2005, 98 (04) :1-103
[23]   Effects of substrate temperature on the properties of Ga-doped ZnO by pulsed laser deposition [J].
Park, Sang-Moo ;
Ikegami, Tomoaki ;
Ebihara, Kenji .
THIN SOLID FILMS, 2006, 513 (1-2) :90-94
[24]   Investigation of transparent conductive oxide Al-doped ZnO films produced by pulsed laser deposition [J].
Park, SM ;
Ikegami, T ;
Ebihara, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (11) :8027-8031
[25]   Dielectric modeling of transmittance spectra of thin ZnO:Al films [J].
Qiao, ZH ;
Agashe, C ;
Mergel, D .
THIN SOLID FILMS, 2006, 496 (02) :520-525
[26]   Deposition, characterization and biological application of epitaxial Li:ZnO/Al:ZnO double-layers [J].
Vlad, A. ;
Yakunin, S. ;
Kolmhofer, E. ;
Kolotovska, V. ;
Muresan, L. ;
Sonnleitner, A. ;
Baeuerle, D. ;
Pedarnig, J. D. .
THIN SOLID FILMS, 2009, 518 (04) :1350-1354
[27]   Zinc oxide nanostructures: growth, properties and applications [J].
Wang, ZL .
JOURNAL OF PHYSICS-CONDENSED MATTER, 2004, 16 (25) :R829-R858
[28]   OPTICAL PROPERTIES OF FREE ELECTRONS IN ZNO [J].
WEIHER, RL .
PHYSICAL REVIEW, 1966, 152 (02) :736-+
[29]   Searching for better plasmonic materials [J].
West, Paul R. ;
Ishii, Satoshi ;
Naik, Gururaj V. ;
Emani, Naresh K. ;
Shalaev, Vladimir M. ;
Boltasseva, Alexandra .
LASER & PHOTONICS REVIEWS, 2010, 4 (06) :795-808
[30]   Ultraviolet amplified spontaneous emission from zinc oxide ridge waveguides on silicon substrate [J].
Yu, SF ;
Yuen, C ;
Lau, SP ;
Wang, YG ;
Lee, HW ;
Tay, BK .
APPLIED PHYSICS LETTERS, 2003, 83 (21) :4288-4290